A nonlinear global model of a dual frequency capacitive discharge

Physics of Plasmas

Volumn 13, Issue 8, 2006, Pages

  Mussenbrock, Thomas ^a   Ziegler, Dennis ^a   Brinkmann, Ralf Peter ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIFFERENTIAL EQUATIONS; ELECTRON RESONANCE; HEATING; NATURAL FREQUENCIES; PLASMAS;

CAPACITIVE DISCHARGE; DISCHARGE CURRENT; DUAL FREQUENCY; ELECTRON-NEUTRAL COLLISION;

ELECTRIC DISCHARGES;

EID: 33748304406     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2244525     Document Type: Article

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