Ion behavior in capacitively-coupled dual-frequency discharges

Journal of Physics: Conference Series

Volumn 86, Issue 1, 2007, Pages

  Donkó, Zoltán ^a   Petrović, Zoran Lj ^b  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36348948433     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/86/1/012011     Document Type: Article

References (30)

1. Liberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (Wiley & Sons, New York)
2. Makabe M and Petrović Z Lj 2006 Plasma Electronics: Applications in Microelectronic Device Fabrication (Taylor and Francis, CRC Press, New York)
3. Kitajima T, Takeo Y, Petrović Z LJ and Makabe T 2000 Appl. Phys. Lett. 77 489
4. Fujita T and Makabe T 2002Plasma Sources Sci. Technol. 11 142
5. Denda T, Miyoshi Y, Komukai Y, Goto T, Petrović Z LJ and Makabe T 2004 J. Appl. Phys. 95 870
6. Ohmori T, Goto T K, Kitajima T and Makabe T 2003 Appl. Phys. Lett. 83 4637
7. Robiche J, Boyle P C, Turner M M and Ellingboe A R 2003 J. Phys. D: Appl. Phys. 36 1810
8. Wakayama G and Nanbu K 2003 IEEE Trans. Plasma Sci. 31 638
9. Kim H C and Lee J K 2005 J. Vac. Sci. Technol. A 23 651
10. Salabas A and Brinkmann R P 2005 Plasma Sources Sci. Technol. 14 S53
11. Donkć Z and Petrović Z Lj 2006 Japan. J. Appl. Phys. 45 8151
12. Turner M M and Chabert P 2006 Phys. Rev. Lett. 96 205001
13. Kurihara M, Petrović Z Lj and Makabe T 2000 J. Phys. D: Appl. Phys. 33 2146
14. Bonham R A 1994 Japan. J. Appl. Phys. 33 4157
15. Phelps A V http://jilawww.colorado.edu/research/colldata.html
16. Georgieva V, Bogaerts A and Gijbels R 2003 J. Appl. Phys. 93 2369
17. Georgieva V, Bogaerts A and Gijbels R 2003 J. Appl. Phys. 94 3748
18. Georgieva V, Bogaerts A and Gijbels R 2004 Phys. Rev. E 69 026406
19. Nanbu K 2000 IEEE Trans. Plasma Sci. 28 971
20. Phelps A V 1994 J. Appl. Phys. 76 747
21. Nanbu K and Denpoh K 1998 J. Phys. Soc. Japan. 67 1288
22. Rauf S and Kushner M J 1997 J. Appl. Phys. 82 2805
23. Denpoh K and Nanbu K 2000 Japan. J. Appl. Phys. 39 2804
24. Donkó Z, Petrović Z Lj and Booth J P 2006 Proc. 23rd Summer School and Int. Symp. on Physics of Ionized Gases (August 28-September 1, 2006, Kopaonik, Serbia) p 399
25. Nanbu K 1997 Phys. Rev. E 55 4642
26. 2000 IEEE Trans. Plasma Sci. 28 971
27. Haverlag M, Kono A, Passchier D, Kroesen G M W, Goedheer W J and de Hoog F J 1991 J. Appl. Phys. 70 3472
28. Liu J, Huppert G L and Sawin H H 1990 J. Appl. Phys. 68 3916
29. Wild C and Koidl P 1991 J. Appl. Phys. 69 2909
30. Lee J K, Manuilenko O V, Babaeva N Yu, Kim H C and Shon J W 2005 Plasma Sources Sci. Technol. 14 89