Modes of low-pressure dual-frequency (27/2 MHz) discharges in hydrogen

Plasma Sources Science and Technology

Volumn 17, Issue 2, 2008, Pages

  Lisovskiy, V ^a   Booth, J P ^b   Landry, K ^c   Douai, D ^d   Cassagne, V ^e   Yegorenkov, V ^a  

^a V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

^b ECOLE POLYTECHNIQUE   (France)

^c Unaxis Displays Division France SAS   (France)

^d IRFM   (France)

^e Riber   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TRANSITIONS; HYDROGEN; IONIZATION; PLASMA SHEATHS; VOLTAGE MEASUREMENT;

DISCHARGE EXTINCTION; DISCHARGE EXTINCTION CURVE; DUAL-FREQUENCY DISCHARGES;

ELECTRIC DISCHARGES;

EID: 43149117477     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/2/025002     Document Type: Article

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