Mechanical characterization of low-dimensional structures through on-chip tests

Micro and Nano Mechanical Testing of Materials and Devices

Volumn , Issue , 2008, Pages 341-375

  Corigliano, Alberto ^a   Cacchione, ^a   Zerbini, Sarah ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 59349083830     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-0-387-78701-5_13     Document Type: Chapter

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