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Volumn 1-9, Issue , 2003, Pages 325-356

8.09 - MEMS Structures for On-chip Testing of Mechanical and Surface Properties of Thin Films

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EID: 4043170019     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B0-08-043749-4/08126-X     Document Type: Chapter
Times cited : (2)

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