-
1
-
-
0029325709
-
Effects of elevated temperature treatments in microstructure release procedures
-
T. Abe, W.C. Messner and M.L. Reed (1995) Effects of elevated temperature treatments in microstructure release procedures. J. Microelectromech. Syst. 4 66-75.
-
(1995)
J. Microelectromech. Syst.
, vol.4
, pp. 66-75
-
-
Abe, T.1
Messner, W.C.2
Reed, M.L.3
-
2
-
-
0038366640
-
Surface topology and fatigue in Si MEMS structures.
-
S. Allameh, B. Gally, S. B. Brown and W. O. Soboyejo, 2000, Surface topology and fatigue in Si MEMS structures. Mechanical Properties of Structural Films, ASTM STP 1413.
-
(2000)
Mechanical Properties of Structural Films, ASTM STP 1413.
-
-
Allameh, S.1
Gally, B.2
Brown, S.B.3
Soboyejo, W.O.4
-
3
-
-
0001782052
-
-
Transducers ’93, Yokohama, Japan,”
-
R. L. Alley, P. Mai, K. Komvopoulos and R. T. Howe, 1993, In: “Proc. 7th Int. Conf. Solid-State Sensors and Actuators, Transducers ’93, Yokohama, Japan,” pp. 288–291.
-
(1993)
In: “Proc. 7th Int. Conf. Solid-State Sensors and Actuators
, pp. 288-291
-
-
Alley, R.L.1
Mai, P.2
Komvopoulos, K.3
Howe, R.T.4
-
4
-
-
0026238539
-
Moisture absorption charateristics of organosiloxane self-assembled monolayers
-
D.L. Angst and G.W. Simmons (1991) Moisture absorption charateristics of organosiloxane self-assembled monolayers. Langmuir 7 2236-2242.
-
(1991)
Langmuir
, vol.7
, pp. 2236-2242
-
-
Angst, D.L.1
Simmons, G.W.2
-
6
-
-
0035880221
-
Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS
-
W.R. Ashurst, C. Yau, C. Carraro, C. Lee, R.T. Howe and R. Maboudian (2001) Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS. Sensors and Actuators A 9 239-248.
-
(2001)
Sensors and Actuators A
, vol.9
, pp. 239-248
-
-
Ashurst, W.R.1
Yau, C.2
Carraro, C.3
Lee, C.4
Howe, R.T.5
Maboudian, R.6
-
7
-
-
0036906242
-
Integrated measurement-modeling approaches for evaluating residual stress using micromachined fixed–fixed beams
-
M.S. Baker, M.P. de Boer, N.F. Smith, I.K. Warne and M.B. Sinclair (2002) Integrated measurement-modeling approaches for evaluating residual stress using micromachined fixed–fixed beams. J. Microelectromech. Syst. 11(6), 743.
-
(2002)
J. Microelectromech. Syst.
, vol.11
, Issue.6
, pp. 743
-
-
Baker, M.S.1
de Boer, M.P.2
Smith, N.F.3
Warne, I.K.4
Sinclair, M.B.5
-
8
-
-
0033340384
-
Recent developments in experimental and theoretical studies of the mechanical behavior of polycrystalline silicon for microelectromechanical systems
-
R. Ballarini (1999) Recent developments in experimental and theoretical studies of the mechanical behavior of polycrystalline silicon for microelectromechanical systems. MRS Symp. Proc. 546 3-14.
-
(1999)
MRS Symp. Proc.
, vol.546
, pp. 3-14
-
-
Ballarini, R.1
-
9
-
-
0031125510
-
The fracture toughness of polysilicon microdevices: a first report
-
R. Ballarini, R.L. Mullen, H. Kahn and A.H. Heuer (1997) The fracture toughness of polysilicon microdevices: a first report. J. Mater. Res. 12 915-922.
-
(1997)
J. Mater. Res.
, vol.12
, pp. 915-922
-
-
Ballarini, R.1
Mullen, R.L.2
Kahn, H.3
Heuer, A.H.4
-
11
-
-
0029223520
-
Design rules for a reliable surface micromachined IC sensor.
-
S. Bart, J. Chang, T. Core and L. Foster, 1995, Design rules for a reliable surface micromachined IC sensor. IEEE Int. Reliability Phys. Proc., 311–317.
-
(1995)
IEEE Int. Reliability Phys. Proc.
, pp. 311-317
-
-
Bart, S.1
Chang, J.2
Core, T.3
Foster, L.4
-
12
-
-
0032092691
-
Dry release of metal structures in oxygen plasma: process characterization and optimization
-
M. Bartek and R.F. Wolffenbuttel (1998) Dry release of metal structures in oxygen plasma: process characterization and optimization. J. Micromech. Microeng. 8 91-94.
-
(1998)
J. Micromech. Microeng.
, vol.8
, pp. 91-94
-
-
Bartek, M.1
Wolffenbuttel, R.F.2
-
13
-
-
85146814771
-
-
Fort Lauderdale, FL, USA
-
J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Maciel and M. Weinberg, 1993, A micromachined comb-drive tuning fork rate gyroscope, Micro Electro Mechanical Systems, Fort Lauderdale, FL, USA.
-
(1993)
A micromachined comb-drive tuning fork rate gyroscope, Micro Electro Mechanical Systems
-
-
Bernstein, J.1
Cho, S.2
King, A.T.3
Kourepenis, A.4
Maciel, P.5
Weinberg, M.6
-
14
-
-
0032304155
-
Adhesion of polysilicon microbeams in controlled humidity ambients.
-
Vol. 518,”, eds. S. B. Brown, J. Gilbert, H. Guckel, R. T. Howe, G. C. Johnson, P. Krulevitch and C. L. Muhlstein, San Francisco, CA
-
M. P. de Boer, P. J. Clews, B. K. Smith and T. A. Michalske, 1998, Adhesion of polysilicon microbeams in controlled humidity ambients. “Mater. Res. Soc. Proc., Vol. 518,” eds. S. B. Brown, J. Gilbert, H. Guckel, R. T. Howe, G. C. Johnson, P. Krulevitch and C. L. Muhlstein, San Francisco, CA, pp. 131–136.
-
(1998)
“Mater. Res. Soc. Proc.
, pp. 131-136
-
-
Clews, P.J.1
Smith, B.K.2
Michalske, T.A.3
-
15
-
-
85146739207
-
Effect of nanotexturing on interfacial adhesion in MEMS.
-
eds. T. Kishi, R. O. Ritchie, K. Ravi-Chandar and A. T. Yokobori, Jr., Honolulu, HI
-
M. P. de Boer, J. A. Knapp and P. J. Clews, 2001a, Effect of nanotexturing on interfacial adhesion in MEMS. “International Conference on Fracture 10,” eds. T. Kishi, R. O. Ritchie, K. Ravi-Chandar and A. T. Yokobori, Jr., Honolulu, HI.
-
(2001)
“International Conference on Fracture 10,”
-
-
Knapp, J.A.1
Clews, P.J.2
-
16
-
-
0034502893
-
Adhesion hysteresis of silane coated microcantilevers
-
M.P. de Boer, J.A. Knapp, T.A. Michalske, U. Srinivasan and R. Maboudian (2000) Adhesion hysteresis of silane coated microcantilevers. Acta Mater. 48 4531-4541.
-
(2000)
Acta Mater.
, vol.48
, pp. 4531-4541
-
-
de Boer, M.P.1
Knapp, J.A.2
Michalske, T.A.3
Srinivasan, U.4
Maboudian, R.5
-
17
-
-
0032614006
-
Accurate method for determining adhesion of cantilever beams
-
M.P. de Boer and T.A. Michalske (1999) Accurate method for determining adhesion of cantilever beams. J. Appl. Phys. 86 817-827.
-
(1999)
J. Appl. Phys.
, vol.86
, pp. 817-827
-
-
de Boer, M.P.1
Michalske, T.A.2
-
18
-
-
8844280854
-
Integrated platform for testing MEMS mechanical properties at the wafer scale by the IMaP methodology
-
S.B. Brown, C.L. Muhlstein (Eds), West Conshohocken, PA: ASTM
-
M.P. de Boer, N.F. Smith, N.D. Masters, M.B. Sinclair and E.J. Pryputniewicz (2001) Integrated platform for testing MEMS mechanical properties at the wafer scale by the IMaP methodology. S.B. Brown, C.L. Muhlstein (Eds) Mechanical Properties of Structural Thin Films, STP 1413 West Conshohocken, PA: ASTM
-
(2001)
Mechanical Properties of Structural Thin Films, STP 1413
-
-
de Boer, M.P.1
Smith, N.F.2
Masters, N.D.3
Sinclair, M.B.4
Pryputniewicz, E.J.5
-
19
-
-
0034299199
-
The impact of solution agglomeration on the deposition of self-assembled monolayers
-
B.C. Bunker, R.W. Carpick, R. Assink, M.L. Thomas, M.G. Hankins, J.A. Voigt, D.L. Sipola, M.P. de Boer and G.L. Gulley (2000) The impact of solution agglomeration on the deposition of self-assembled monolayers. Langmuir 16 7742-7751.
-
(2000)
Langmuir
, vol.16
, pp. 7742-7751
-
-
Bunker, B.C.1
Carpick, R.W.2
Assink, R.3
Thomas, M.L.4
Hankins, M.G.5
Voigt, J.A.6
Sipola, D.L.7
de Boer, M.P.8
Gulley, G.L.9
-
20
-
-
0024092557
-
Development of a high-resolution thermal inkjet printhead
-
W.A. Buskirk, D.E. Hackleman, S.T. Hall, P.H. Kanarek, R.N. Low, K.E. Trueba and R.R. Vandepoll (1988) Development of a high-resolution thermal inkjet printhead. Hewlett-Packard J. 39 55-61.
-
(1988)
Hewlett-Packard J.
, vol.39
, pp. 55-61
-
-
Buskirk, W.A.1
Hackleman, D.E.2
Hall, S.T.3
Kanarek, P.H.4
Low, R.N.5
Trueba, K.E.6
Vandepoll, R.R.7
-
21
-
-
0035980452
-
Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology
-
L. Cao, S. Mantell and D. Polla (2001) Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology. Sensors and Actuators A 94 117-125.
-
(2001)
Sensors and Actuators A
, vol.94
, pp. 117-125
-
-
Cao, L.1
Mantell, S.2
Polla, D.3
-
22
-
-
11644250911
-
Observation of three growth mechanisms in self-assembled monolayers
-
C. Carraro, O.W. Yauw, M.M. Sung and R. Maboudian (1998) Observation of three growth mechanisms in self-assembled monolayers. J. Phys. Chem. B 102 4441-4445.
-
(1998)
J. Phys. Chem. B
, vol.102
, pp. 4441-4445
-
-
Carraro, C.1
Yauw, O.W.2
Sung, M.M.3
Maboudian, R.4
-
23
-
-
0343698203
-
Comprehensive static characterization of vertical electrostatically actuated polysilicon beams
-
E.K. Chan, K. Garikipati and R.W. Dutton (1999) Comprehensive static characterization of vertical electrostatically actuated polysilicon beams. IEEE Des. Test Comp. 16 58-65.
-
(1999)
IEEE Des. Test Comp.
, vol.16
, pp. 58-65
-
-
Chan, E.K.1
Garikipati, K.2
Dutton, R.W.3
-
24
-
-
0032163636
-
Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products
-
K.H.L. Chau and R.E. Sulouff (1998) Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products. Microelect. J. 29 579-586.
-
(1998)
Microelect. J.
, vol.29
, pp. 579-586
-
-
Chau, K.H.L.1
Sulouff, R.E.2
-
25
-
-
0026882936
-
Slow crack growth in single-crystal silicon
-
J.A. Connally and S.B. Brown (1992) Slow crack growth in single-crystal silicon. Science 256 1537-1539.
-
(1992)
Science
, vol.256
, pp. 1537-1539
-
-
Connally, J.A.1
Brown, S.B.2
-
27
-
-
8844277932
-
Nanosystem measures ultraslow crack growth.
-
J. A. Connally and S. B. Brown, 1993b, Nanosystem measures ultraslow crack growth. MRS Bull., June, p. 4.
-
(1993)
MRS Bull., June
, pp. 4
-
-
Connally, J.A.1
Brown, S.B.2
-
28
-
-
0031649731
-
Lifetime estimates and unique failure mechanisms of the digital micromirror device (DMD).
-
M. R. Douglass, 1998, Lifetime estimates and unique failure mechanisms of the digital micromirror device (DMD). IEEE Int. Reliability Proc., 9–16.
-
(1998)
IEEE Int. Reliability Proc.
, pp. 9-16
-
-
Douglass, M.R.1
-
30
-
-
0026186579
-
Pressure sensors merge micromaching and microelectronics
-
R. Frank (1991) Pressure sensors merge micromaching and microelectronics. Sensors and Actuators A 28 93-103.
-
(1991)
Sensors and Actuators A
, vol.28
, pp. 93-103
-
-
Frank, R.1
-
31
-
-
0001229556
-
The effect of surface roughness on the adhesion of elastic solids
-
K.N.G. Fuller and D. Tabor (1975) The effect of surface roughness on the adhesion of elastic solids. Proc. Roy. Soc. London A 345 327-342.
-
(1975)
Proc. Roy. Soc. London A
, vol.345
, pp. 327-342
-
-
Fuller, K.N.G.1
Tabor, D.2
-
33
-
-
0002193058
-
Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures
-
S. Greek, F. Ericson, S. Johansson, M. Furtsch and A. Rump (1999) Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures. J. Micromech. Microeng. 9 245-251.
-
(1999)
J. Micromech. Microeng.
, vol.9
, pp. 245-251
-
-
Greek, S.1
Ericson, F.2
Johansson, S.3
Furtsch, M.4
Rump, A.5
-
34
-
-
0026873781
-
Diagnostic microstructures for the measurement of intrinsic strain in thin films
-
H. Guckel, D. Burns, C. Rutigliano, E. Lovell and B. Choi (1992) Diagnostic microstructures for the measurement of intrinsic strain in thin films. J. Micromech. Microeng. 2 86-95.
-
(1992)
J. Micromech. Microeng.
, vol.2
, pp. 86-95
-
-
Guckel, H.1
Burns, D.2
Rutigliano, C.3
Lovell, E.4
Choi, B.5
-
35
-
-
0000615126
-
Electromagnetic linear actuators with inductive position sensing
-
H. Guckel, T. Earles, J. Klein, J.D. Zook and T. Ohnstein (1996) Electromagnetic linear actuators with inductive position sensing. Sensors and Actuators A 53 386-391.
-
(1996)
Sensors and Actuators A
, vol.53
, pp. 386-391
-
-
Guckel, H.1
Earles, T.2
Klein, J.3
Zook, J.D.4
Ohnstein, T.5
-
36
-
-
0010123339
-
Stress relaxation in Si-rich silicon nitride thin films
-
S. Habermehl (1998) Stress relaxation in Si-rich silicon nitride thin films. J. Appl. Phys. 83 4672-4677.
-
(1998)
J. Appl. Phys.
, vol.83
, pp. 4672-4677
-
-
Habermehl, S.1
-
37
-
-
0030726261
-
Lubrication of digital micromirror devices
-
S.A. Henck (1997) Lubrication of digital micromirror devices. Tribol. Lett. 3 239-247.
-
(1997)
Tribol. Lett.
, vol.3
, pp. 239-247
-
-
Henck, S.A.1
-
38
-
-
0001599232
-
Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces
-
M.R. Houston, R.T. Howe and R. Maboudian (1997) Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces. J. Appl. Phys. 81 3474-3483.
-
(1997)
J. Appl. Phys.
, vol.81
, pp. 3474-3483
-
-
Houston, M.R.1
Howe, R.T.2
Maboudian, R.3
-
41
-
-
0025507101
-
Adhesion and short-range forces between surfaces: I. New apparatus for surface force measurements
-
J.N. Israelachvili and P.M. McGuiggan (1990) Adhesion and short-range forces between surfaces: I. New apparatus for surface force measurements. J. Mater. Res. 5 2223.
-
(1990)
J. Mater. Res.
, vol.5
, pp. 2223
-
-
Israelachvili, J.N.1
McGuiggan, P.M.2
-
42
-
-
0033338028
-
Interferometric measurement for improved understanding of boundary effects in micromachined beams.
-
Vol. 3875, eds. Y. Vladimiirsky and C. R. Friederich, Santa Clara, CA
-
B. D. Jensen, M. P. de Boer and F. Bitsie, 1999, Interferometric measurement for improved understanding of boundary effects in micromachined beams. “Proceedings of the SPIE—Materials and Device Characterization in Mircomachining II, Vol. 3875, eds. Y. Vladimiirsky and C. R. Friederich, Santa Clara, CA, pp. 61–72.
-
(1999)
“Proceedings of the SPIE—Materials and Device Characterization in Mircomachining II
, pp. 61-72
-
-
Jensen, B.D.1
Bitsie, F.2
-
43
-
-
0035439352
-
Interferometry of actuated cantilevers to determine material properties and test structure non-idealities in MEMS
-
B.D. Jensen, M.P. de Boer, N.D. Masters, F. Bitsie and D.A. LaVan (2001) Interferometry of actuated cantilevers to determine material properties and test structure non-idealities in MEMS. J. Microelectromech. Syst. 10 336-346.
-
(2001)
J. Microelectromech. Syst.
, vol.10
, pp. 336-346
-
-
Jensen, B.D.1
de Boer, M.P.2
Masters, N.D.3
Bitsie, F.4
LaVan, D.A.5
-
44
-
-
8844231764
-
Determining the strength of brittle thin films for MEMS.
-
G. C. Johnson, P. T. Jones, M. T. Wu and T. Honda, 2001, Determining the strength of brittle thin films for MEMS. Mechanical Properties of Structural Films, ASTM STP 1413, 278–289.
-
(2001)
Mechanical Properties of Structural Films, ASTM STP
, vol.1413
, pp. 278-289
-
-
Johnson, G.C.1
Jones, P.T.2
Wu, M.T.3
Honda, T.4
-
46
-
-
0037050632
-
Homogeneous nucleation during crystallization of amorphous silicon produced by LPCVD
-
H. Kahn, A.Q. He and A.H. Heuer (2002) Homogeneous nucleation during crystallization of amorphous silicon produced by LPCVD. Phil. Mag. A82 137-165.
-
(2002)
Phil. Mag.
, vol.A82
, pp. 137-165
-
-
Kahn, H.1
He, A.Q.2
Heuer, A.H.3
-
47
-
-
0033749085
-
Fracture toughness of polysilicon MEMS devices
-
H. Kahn, N. Tayebi, R. Ballarini, R.L. Mullen and A.H. Heuer (2000) Fracture toughness of polysilicon MEMS devices. Sensors and Actuators A 82 274-280.
-
(2000)
Sensors and Actuators A
, vol.82
, pp. 274-280
-
-
Kahn, H.1
Tayebi, N.2
Ballarini, R.3
Mullen, R.L.4
Heuer, A.H.5
-
49
-
-
0026976496
-
Determination of Young's moduli of micromechanical thin films using the resonance method
-
L. Kiesewetter, J.-M. Zhang, D. Houdeau and A. Steckenborn (1992) Determination of Young's moduli of micromechanical thin films using the resonance method. Sensors and Actuators A 35 153-159.
-
(1992)
Sensors and Actuators A
, vol.35
, pp. 153-159
-
-
Kiesewetter, L.1
Zhang, J.-M.2
Houdeau, D.3
Steckenborn, A.4
-
50
-
-
0035280092
-
A new organic modifier for anti-stiction
-
B.H. Kim, T.D. Chung, C.H. Oh and K. Chun (2001) A new organic modifier for anti-stiction. J. Microelectromech. Syst. 10(1), 33.
-
(2001)
J. Microelectromech. Syst.
, vol.10
, Issue.1
, pp. 33
-
-
Kim, B.H.1
Chung, T.D.2
Oh, C.H.3
Chun, K.4
-
51
-
-
0031648044
-
Comparative-evaluation of drying techniques for surface micromachining
-
C.J. Kim, J.Y. Kim and B. Sridharan (1998) Comparative-evaluation of drying techniques for surface micromachining. Sensors and Actuators A 64 17-26.
-
(1998)
Sensors and Actuators A
, vol.64
, pp. 17-26
-
-
Kim, C.J.1
Kim, J.Y.2
Sridharan, B.3
-
52
-
-
0032631257
-
Lateral force microscopy study of functionalized self-assembled monolayer surfaces
-
Y. Kim, K.-S. Kim, M. Park and J. Jeong (1999) Lateral force microscopy study of functionalized self-assembled monolayer surfaces. Thin Solid Films 341 91-93.
-
(1999)
Thin Solid Films
, vol.341
, pp. 91-93
-
-
Kim, Y.1
Kim, K.-S.2
Park, M.3
Jeong, J.4
-
53
-
-
0036905711
-
Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces
-
J.A. Knapp and M.P. de Boer (2002) Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces. J. Microelectromech. Syst. 11(6), 754.
-
(2002)
J. Microelectromech. Syst.
, vol.11
, Issue.6
, pp. 754
-
-
Knapp, J.A.1
de Boer, M.P.2
-
54
-
-
0000592102
-
Finite element modeling of nanoindentation
-
J.A. Knapp, D.M. Follstaedt, S.M. Myers, J.C. Barbour and T.A. Friedmann (1999) Finite element modeling of nanoindentation. J. Appl. Phys. 85 1460-1474.
-
(1999)
J. Appl. Phys.
, vol.85
, pp. 1460-1474
-
-
Knapp, J.A.1
Follstaedt, D.M.2
Myers, S.M.3
Barbour, J.C.4
Friedmann, T.A.5
-
55
-
-
0002963356
-
Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation
-
K. Komai, K. Minoshima and S. Inoue (1998) Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation. Microsystem Technol. 5 30-37.
-
(1998)
Microsystem Technol.
, vol.5
, pp. 30-37
-
-
Komai, K.1
Minoshima, K.2
Inoue, S.3
-
56
-
-
0031190083
-
A fractal analysis of stiction in microelectromechanical systems
-
K. Komvopoulos and W. Yan (1997) A fractal analysis of stiction in microelectromechanical systems. J. Tribol. 119 391-400.
-
(1997)
J. Tribol.
, vol.119
, pp. 391-400
-
-
Komvopoulos, K.1
Yan, W.2
-
57
-
-
0001721125
-
Damping of a crystal oscillator by an adsorbed monolayer and its relation to interfacial viscosity
-
J. Krim and A. Widom (1988) Damping of a crystal oscillator by an adsorbed monolayer and its relation to interfacial viscosity. Phys. Rev. B 38 12184-12189.
-
(1988)
Phys. Rev. B
, vol.38
, pp. 12184-12189
-
-
Krim, J.1
Widom, A.2
-
58
-
-
0038403050
-
The influence of coating structure on micromachine stiction
-
J.G. Kushmerick, M.G. Hankins, M.P. de Boer, P.J. Clews, R.W. Carpick and B.C. Bunker (2001) The influence of coating structure on micromachine stiction. Tribol. Lett. 10 103-110.
-
(2001)
Tribol. Lett.
, vol.10
, pp. 103-110
-
-
Kushmerick, J.G.1
Hankins, M.G.2
de Boer, M.P.3
Clews, P.J.4
Carpick, R.W.5
Bunker, B.C.6
-
60
-
-
8844239192
-
Cross comparison of direct strength testing techniques on polysilicon films.
-
D. A. LaVan, T. Tsuchiya, G. Coles, W. G. Knauss, I. Chasiots and D. Read, 2001, Cross comparison of direct strength testing techniques on polysilicon films. Mechanical Properties of Structural Films, ASTM STP 1413, 16–27.
-
(2001)
Mechanical Properties of Structural Films, ASTM STP
, vol.1413
, pp. 16-27
-
-
LaVan, D.A.1
Tsuchiya, T.2
Coles, G.3
Knauss, W.G.4
Chasiots, I.5
Read, D.6
-
61
-
-
0031235607
-
Dry release for surface micromachining with HF vapor-phase etching
-
Y.I. Lee, K.H. Park, J. Lee, C.S. Lee, H.J. Yoo, C.J. Kim and Y.S. Yoon (1998) Dry release for surface micromachining with HF vapor-phase etching. J. Microelectromech. Syst. 6 226-233.
-
(1998)
J. Microelectromech. Syst.
, vol.6
, pp. 226-233
-
-
Lee, Y.I.1
Park, K.H.2
Lee, J.3
Lee, C.S.4
Yoo, H.J.5
Kim, C.J.6
Yoon, Y.S.7
-
62
-
-
85146812579
-
Chemical vapor deposition coating for micromachines.
-
April 24–26, 2000, San Francisco, CA, USA”
-
S. S. Mani, J. G. Fleming, J. J. Sniegowski, M. P. de Boer, L. W. Irwin, J. A. Walraven, D. M. Tanner and M. T. Dugger, 2000, Chemical vapor deposition coating for micromachines. In: “New Methods, Mechanisms and Models of Vapor Deposition Symposium, April 24–26, 2000, San Francisco, CA, USA”.
-
(2000)
In: “New Methods, Mechanisms and Models of Vapor Deposition Symposium
-
-
Mani, S.S.1
Fleming, J.G.2
Sniegowski, J.J.3
Irwin, L.W.4
Walraven, J.A.5
Tanner, D.M.6
Dugger, M.T.7
-
63
-
-
0031163708
-
Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component
-
C. Marxer, M.-A. Gretillat, N.F. de Rooij, R. Battig, O. Anthamatten, B. Valk and P. Vogel (1997) Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component. Sensors and Actuators A 61 449-454.
-
(1997)
Sensors and Actuators A
, vol.61
, pp. 449-454
-
-
Marxer, C.1
Gretillat, M.-A.2
de Rooij, N.F.3
Battig, R.4
Anthamatten, O.5
Valk, B.6
Vogel, P.7
-
65
-
-
8844269278
-
Side-by-side comparison of passive MEMS strain test structures under residual compression
-
S.B. Brown, C.L. Muhlstein (Eds), West Conshohocken, PA: ASTM
-
N.D. Masters, M.P. de Boer, B.D. Jensen, M.S. Baker and D. Koeste (2001) Side-by-side comparison of passive MEMS strain test structures under residual compression. S.B. Brown, C.L. Muhlstein (Eds) Mechanical Properties of Structural Thin Films, STP 1413 West Conshohocken, PA: ASTM
-
(2001)
Mechanical Properties of Structural Thin Films, STP 1413
-
-
Masters, N.D.1
de Boer, M.P.2
Jensen, B.D.3
Baker, M.S.4
Koeste, D.5
-
66
-
-
0027567658
-
Mechanical stability and adhesion of microstructures under capillary forces: Part I. Basic theory
-
C.H. Mastrangelo and C.H. Hsu (1993) Mechanical stability and adhesion of microstructures under capillary forces: Part I. Basic theory. J. Microelectromech. Syst. 2 33-43.
-
(1993)
J. Microelectromech. Syst.
, vol.2
, pp. 33-43
-
-
Mastrangelo, C.H.1
Hsu, C.H.2
-
67
-
-
0027565299
-
Mechanical stability and adhesion of microstructures under capillary forces: Part II. Experiments
-
C.H. Mastrangelo and C.H. Hsu (1993) Mechanical stability and adhesion of microstructures under capillary forces: Part II. Experiments. J. Microelectromech. Syst. 2 44-55.
-
(1993)
J. Microelectromech. Syst.
, vol.2
, pp. 44-55
-
-
Mastrangelo, C.H.1
Hsu, C.H.2
-
68
-
-
0000206579
-
On the contact and adhesion of rough surfaces
-
D. Maugis (1996) On the contact and adhesion of rough surfaces. J. Adh. Sci. Tech. 10 161-175.
-
(1996)
J. Adh. Sci. Tech.
, vol.10
, pp. 161-175
-
-
Maugis, D.1
-
70
-
-
0034268805
-
Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems
-
T.M. Mayer, M.P. de Boer, N.D. Shinn, P.J. Clews and T.A. Michalske (2000) Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems. J. Vacuum Sci. Technol. B 18 2433-2440.
-
(2000)
J. Vacuum Sci. Technol. B
, vol.18
, pp. 2433-2440
-
-
Mayer, T.M.1
de Boer, M.P.2
Shinn, N.D.3
Clews, P.J.4
Michalske, T.A.5
-
71
-
-
0028521762
-
Role of solvent on the silanization of glass with octadecyltrichlorosilane
-
M.E. McGovern, K.M.R. Kallury and M. Thompson (1994) Role of solvent on the silanization of glass with octadecyltrichlorosilane. Langmuir 10 3607-3614.
-
(1994)
Langmuir
, vol.10
, pp. 3607-3614
-
-
McGovern, M.E.1
Kallury, K.M.R.2
Thompson, M.3
-
72
-
-
0037914176
-
Quantitative fractographic analysis of fracture origins in glass
-
R.C. Bradt, R.E. Tressler (Eds), Plenum
-
J.J. Mecholsky (1994) Quantitative fractographic analysis of fracture origins in glass. R.C. Bradt, R.E. Tressler (Eds) Fractography of Glass Plenum 37-73.
-
(1994)
Fractography of Glass
, pp. 37-73
-
-
Mecholsky, J.J.1
-
73
-
-
5244261900
-
Friction and wear of Langmuir–Blodgett films observed by friction force microscopy
-
E. Meyer, R. Overney, D. Brodbeck, L. Howald, R. Luthi, J. Frommer and H.-J. Guntherodt (1992) Friction and wear of Langmuir–Blodgett films observed by friction force microscopy. Phys. Rev. Lett. 69 1777-1780.
-
(1992)
Phys. Rev. Lett.
, vol.69
, pp. 1777-1780
-
-
Meyer, E.1
Overney, R.2
Brodbeck, D.3
Howald, L.4
Luthi, R.5
Frommer, J.6
Guntherodt, H.-J.7
-
74
-
-
0022160768
-
Closure and repropagation of healed cracks in silicate glass
-
T.A. Michalske and E.R. Fuller (1985) Closure and repropagation of healed cracks in silicate glass. J. Am. Ceram. Soc. 68 586-590.
-
(1985)
J. Am. Ceram. Soc.
, vol.68
, pp. 586-590
-
-
Michalske, T.A.1
Fuller, E.R.2
-
75
-
-
79957937922
-
Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems
-
C.L. Muhlstein, E.A. Stach and R.O. Ritchie (2002) Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems. Appl. Phys. Lett. 80 1532-1534.
-
(2002)
Appl. Phys. Lett.
, vol.80
, pp. 1532-1534
-
-
Muhlstein, C.L.1
Stach, E.A.2
Ritchie, R.O.3
-
76
-
-
0001867861
-
Supercritical carbon dioxide drying of microstructures.
-
Transducers ‘93, Yokohama, Japan, (June 7–10, 1993),”
-
G. T. Mulhern, D. S. Soane and R. T. Howe, 1995, Supercritical carbon dioxide drying of microstructures. “Proc. 7th Int. Conf. Solid-state Sensors and Actuators, Transducers ‘93, Yokohama, Japan (June 7–10, 1993),” pp. 296–299.
-
(1995)
“Proc. 7th Int. Conf. Solid-state Sensors and Actuators
, pp. 296-299
-
-
Mulhern, G.T.1
Soane, D.S.2
Howe, R.T.3
-
77
-
-
0029221518
-
Residual-stress strain analysis in thin films by X-ray diffraction
-
I.C. Noyan, T.C. Huang and B.R. York (1995) Residual-stress strain analysis in thin films by X-ray diffraction. Crit. Rev. Sol. St. Mat. Sci. 20 125-177.
-
(1995)
Crit. Rev. Sol. St. Mat. Sci.
, vol.20
, pp. 125-177
-
-
Noyan, I.C.1
Huang, T.C.2
York, B.R.3
-
78
-
-
0026875935
-
An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments
-
W.C. Oliver and G.M. Pharr (1992) An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7 1564-1583.
-
(1992)
J. Mater. Res.
, vol.7
, pp. 1564-1583
-
-
Oliver, W.C.1
Pharr, G.M.2
-
79
-
-
0031168990
-
M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures
-
P.M. Osterberg and S.D. Senturia (1997) M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures. J. Microelectromech. Syst. 6 107-118.
-
(1997)
J. Microelectromech. Syst.
, vol.6
, pp. 107-118
-
-
Osterberg, P.M.1
Senturia, S.D.2
-
80
-
-
33751154385
-
Correlation of molecular organization and substrate wettability in the self-assembly of n-alkylsiloxane monolayers
-
A.N. Parikh, B. Liedberg, S.V. Atre, M. Ho and D.L. Allara (1995) Correlation of molecular organization and substrate wettability in the self-assembly of n-alkylsiloxane monolayers. J. Phys. Chem. 99 9996-10009.
-
(1995)
J. Phys. Chem.
, vol.99
, pp. 9996-10009
-
-
Parikh, A.N.1
Liedberg, B.2
Atre, S.V.3
Ho, M.4
Allara, D.L.5
-
81
-
-
0029754970
-
Bonding and tribological properties of perfluorinated lubricants and hydrogenated amorphous carbon films
-
S.S. Perry, C.M. Mate, R.L. White and G.A. Somorjai (1996) Bonding and tribological properties of perfluorinated lubricants and hydrogenated amorphous carbon films. IEEE Trans. Magnet. 32 115-121.
-
(1996)
IEEE Trans. Magnet.
, vol.32
, pp. 115-121
-
-
Perry, S.S.1
Mate, C.M.2
White, R.L.3
Somorjai, G.A.4
-
82
-
-
0018541427
-
Young's modulus measurement of thin films using micromechanics
-
K.E. Petersen (1979) Young's modulus measurement of thin films using micromechanics. J. Appl. Phys. 50 6761-6766.
-
(1979)
J. Appl. Phys.
, vol.50
, pp. 6761-6766
-
-
Petersen, K.E.1
-
83
-
-
85146766622
-
“Characterization of Sidewall and Planar Surfaces of Electroformed LIGA Parts,”
-
Sandia National Laboratories, Albuquerque, NM
-
S. V. Prasad, A. C. Hall and M. T. Dugger, 2000, “Characterization of Sidewall and Planar Surfaces of Electroformed LIGA Parts,” Report SAND2000-1702, Sandia National Laboratories, Albuquerque, NM.
-
(2000)
Report SAND2000-1702
-
-
Prasad, S.V.1
Hall, A.C.2
Dugger, M.T.3
-
84
-
-
0028407612
-
Micromachined optical planes and reflectors in silicon
-
L. Rosengren, L. Smith and Y. Baecklund (1994) Micromachined optical planes and reflectors in silicon. Sensors and Actuators A 41/42 330-333.
-
(1994)
Sensors and Actuators A
, vol.41/42
, pp. 330-333
-
-
Rosengren, L.1
Smith, L.2
Baecklund, Y.3
-
85
-
-
0010880557
-
Supercritical carbon dioxide extraction of solvent from micromachined structures
-
M.A. Abraham, A.K. Sunol (Eds), Washington, DC: American Chemical Society
-
E.M. Russick, C.L.J. Adkins and C.W. Dyck (1997) Supercritical carbon dioxide extraction of solvent from micromachined structures. M.A. Abraham, A.K. Sunol (Eds) Supercritical Fluids, Extraction and Pollution Prevention. vol. 670 Washington, DC: American Chemical Society 255-269.
-
(1997)
Supercritical Fluids, Extraction and Pollution Prevention.
, vol.670
, pp. 255-269
-
-
Russick, E.M.1
Adkins, C.L.J.2
Dyck, C.W.3
-
87
-
-
0031209183
-
High-resolution imaging of liquid structures: wetting and capillary phenomena at the nanometer scale
-
M. Salmeron, L. Xu, J. Hu and Q. Dai (1997) High-resolution imaging of liquid structures: wetting and capillary phenomena at the nanometer scale. MRS Bull. 22 36-41.
-
(1997)
MRS Bull.
, vol.22
, pp. 36-41
-
-
Salmeron, M.1
Xu, L.2
Hu, J.3
Dai, Q.4
-
88
-
-
84972102741
-
Mechanical characterization of thin films by micromechanical techniques
-
J.-Å. Schweitz (1992) Mechanical characterization of thin films by micromechanical techniques. MRS Bull. 17 34-45.
-
(1992)
MRS Bull.
, vol.17
, pp. 34-45
-
-
Schweitz, J.-Å.1
-
89
-
-
0032292269
-
Round-robin tests of modulus and strength of polysilicon.
-
eds. J. Gilbert, S. B. Brown, H. Guckel, R. T. Howe, G. C. Johnson, P. Krulevitch and C. L. Muhlstein, San Francisco, CA
-
W. N. Sharpe, S. B. Brown, G. C. Johnson and W. G. Knauss, 1998, Round-robin tests of modulus and strength of polysilicon. In: “Mater. Res. Soc. Proc.—Microelectromechanical Structures for Materials Research,” eds. J. Gilbert, S. B. Brown, H. Guckel, R. T. Howe, G. C. Johnson, P. Krulevitch and C. L. Muhlstein, San Francisco, CA, vol. 518, pp. 57–65.
-
(1998)
In: “Mater. Res. Soc. Proc.—Microelectromechanical Structures for Materials Research,”
, vol.518
, pp. 57-65
-
-
Sharpe, W.N.1
Brown, S.B.2
Johnson, G.C.3
Knauss, W.G.4
-
91
-
-
0031236953
-
A new technique for measuring the mechanical properties of thin-films
-
W.N. Sharpe, B. Yuan and R.L. Edwards (1997) A new technique for measuring the mechanical properties of thin-films. J. Microelectromech. Syst. 6 193-199.
-
(1997)
J. Microelectromech. Syst.
, vol.6
, pp. 193-199
-
-
Sharpe, W.N.1
Yuan, B.2
Edwards, R.L.3
-
92
-
-
0033693245
-
IC-compatible polysilicon surface micromachining
-
J.J. Sniegowski and M.P. de Boer (2000) IC-compatible polysilicon surface micromachining. Ann. Rev. Mater. Sci. 30 299-333.
-
(2000)
Ann. Rev. Mater. Sci.
, vol.30
, pp. 299-333
-
-
Sniegowski, J.J.1
de Boer, M.P.2
-
93
-
-
0032098211
-
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
-
U. Srinivasan, M.R. Houston, R.T. Howe and R. Maboudian (1998) Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines. J. Microelectromech. Syst. 7 252-260.
-
(1998)
J. Microelectromech. Syst.
, vol.7
, pp. 252-260
-
-
Srinivasan, U.1
Houston, M.R.2
Howe, R.T.3
Maboudian, R.4
-
94
-
-
0002528131
-
-
Hilton Head ’98, Hilton Head Island, SC, USA
-
U. Srinivasan, J. D. Foster, U. Habib, R. T. Howe, R. Maboudian, D. C. Senft and M. T. Dugger, 1998b, Lubrication of polysilicon micromechanisms with self-assembled monolayers. Hilton Head ’98, Hilton Head Island, SC, USA, pp. 156–161.
-
(1998)
Lubrication of polysilicon micromechanisms with self-assembled monolayers.
, pp. 156-161
-
-
Srinivasan, U.1
Foster, J.D.2
Habib, U.3
Howe, R.T.4
Maboudian, R.5
Senft, D.C.6
Dugger, M.T.7
-
95
-
-
0345045361
-
Thoughts on the structure of alkylsilane monolayers
-
M.J. Stevens (1999) Thoughts on the structure of alkylsilane monolayers. Langmuir 15(8), 2773.
-
(1999)
Langmuir
, vol.15
, Issue.8
, pp. 2773
-
-
Stevens, M.J.1
-
96
-
-
0004274342
-
-
Cambridge: Cambridge University Press
-
S. Suresh (1991) Fatigue of Materials Cambridge: Cambridge University Press
-
(1991)
Fatigue of Materials
-
-
Suresh, S.1
-
100
-
-
0032687067
-
Frequency dependence of the lifetime of a surface micromachined microengine driving a load
-
D.M. Tanner, W.M. Miller, K.A. Peterson, M.T. Dugger, W.P. Eaton, L.W. Irwin, D.C. Senft, N.F. Smith, P. Tangyunyong and S.L. Miller (1999) Frequency dependence of the lifetime of a surface micromachined microengine driving a load. Microelectronics Reliability 39 401-414.
-
(1999)
Microelectronics Reliability
, vol.39
, pp. 401-414
-
-
Tanner, D.M.1
Miller, W.M.2
Peterson, K.A.3
Dugger, M.T.4
Eaton, W.P.5
Irwin, L.W.6
Senft, D.C.7
Smith, N.F.8
Tangyunyong, P.9
Miller, S.L.10
-
101
-
-
0032670035
-
“The Effect of Humidity on the Reliability of a Surface Micromachined Microengine, Annu.
-
D. M. Tanner, J. A. Walraven, L. W. Irwin, M. T. Dugger, N. F. Smith, W. M. Miller and S. L. Miller, 1999b, “The Effect of Humidity on the Reliability of a Surface Micromachined Microengine, Annu. Proc. Reliab. Phys. Symp., IEEE Reliability Society,” pp. 189–197.
-
(1999)
Proc. Reliab. Phys. Symp., IEEE Reliability Society,”
, pp. 189-197
-
-
Tanner, D.M.1
Walraven, J.A.2
Irwin, L.W.3
Dugger, M.T.4
Smith, N.F.5
Miller, W.M.6
Miller, S.L.7
-
103
-
-
0000377766
-
Microfabrication using synchrotron radiation
-
D.W.L. Tolfree (1998) Microfabrication using synchrotron radiation. Rep. Prog. Phys. 61 313-351.
-
(1998)
Rep. Prog. Phys.
, vol.61
, pp. 313-351
-
-
Tolfree, D.W.L.1
-
104
-
-
0000873407
-
Direct observation of the surface bonds between self-assembled monolayers of octadecyltrichlorosilane and silica surfaces: a low frequency IR study at the solid/liquid interface
-
C.P. Tripp and M.L. Hair (1995) Direct observation of the surface bonds between self-assembled monolayers of octadecyltrichlorosilane and silica surfaces: a low frequency IR study at the solid/liquid interface. Langmuir 11 1215-1219.
-
(1995)
Langmuir
, vol.11
, pp. 1215-1219
-
-
Tripp, C.P.1
Hair, M.L.2
-
105
-
-
0031631279
-
Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions
-
T. Tsuchiya, J. Sakata and Y. Taga (1997) Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions. MRS Symp. Proc. 505 285-290.
-
(1997)
MRS Symp. Proc.
, vol.505
, pp. 285-290
-
-
Tsuchiya, T.1
Sakata, J.2
Taga, Y.3
-
106
-
-
0032026436
-
Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films
-
T. Tsuchiya, O. Tabata, J. Sakata and Y. Taga (1998) Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films. J. Micromech. Microeng. 7 106-113.
-
(1998)
J. Micromech. Microeng.
, vol.7
, pp. 106-113
-
-
Tsuchiya, T.1
Tabata, O.2
Sakata, J.3
Taga, Y.4
-
107
-
-
0033639719
-
Role of defects in compression and friction of anchored hydrocarbon chains on diamond
-
A.B. Tutein, S.J. Stuart and J.A. Harrison (2000) Role of defects in compression and friction of anchored hydrocarbon chains on diamond. Langmuir 16 291-296.
-
(2000)
Langmuir
, vol.16
, pp. 291-296
-
-
Tutein, A.B.1
Stuart, S.J.2
Harrison, J.A.3
-
109
-
-
0034227605
-
Study on single-bond interaction between amino-terminated organosilane self-assembled monolayers by atomic force microscopy
-
Z.Q. Wei, C.F. Wang, C.Q. Zhu, C.Q. Zhou, B. Xu and C.L. Bai (2000) Study on single-bond interaction between amino-terminated organosilane self-assembled monolayers by atomic force microscopy. Surf. Sci. 459 401-412.
-
(2000)
Surf. Sci.
, vol.459
, pp. 401-412
-
-
Wei, Z.Q.1
Wang, C.F.2
Zhu, C.Q.3
Zhou, C.Q.4
Xu, B.5
Bai, C.L.6
-
110
-
-
84977695915
-
Influence of water vapor on crack propagation in soda-lime glass
-
S.M. Wiederhorn (1967) Influence of water vapor on crack propagation in soda-lime glass. J. Am. Ceram. Soc. 50 407-414.
-
(1967)
J. Am. Ceram. Soc.
, vol.50
, pp. 407-414
-
-
Wiederhorn, S.M.1
-
111
-
-
0031550275
-
Mixed self-assembled monolayers in chemical separations
-
M.J. Wirth, R.W.P. Fairbank and H.O. Fatunmbi (1997) Mixed self-assembled monolayers in chemical separations. Science 275 44-47.
-
(1997)
Science
, vol.275
, pp. 44-47
-
-
Wirth, M.J.1
Fairbank, R.W.P.2
Fatunmbi, H.O.3
-
112
-
-
0031703657
-
Friction and adhesion hysteresis of fluorocarbon surfactant monolayer-coated surfaces measured with the surface forces apparatus
-
S. Yamada and J.N. Israelachvili (1998) Friction and adhesion hysteresis of fluorocarbon surfactant monolayer-coated surfaces measured with the surface forces apparatus. J. Phys. Chem. B 102 234-244.
-
(1998)
J. Phys. Chem. B
, vol.102
, pp. 234-244
-
-
Yamada, S.1
Israelachvili, J.N.2
-
113
-
-
0034469351
-
TM process
-
J. Yang, H. Kahn, A.Q. He, S.M. Phillips and A.H. Heuer (1999) An improved technique for producing zero stress LPCVD polysilicon films: the Multipoly TM process. J. Microelectromech. Syst. 9 485-494.
-
(1999)
J. Microelectromech. Syst.
, vol.9
, pp. 485-494
-
-
Yang, J.1
Kahn, H.2
He, A.Q.3
Phillips, S.M.4
Heuer, A.H.5
-
114
-
-
0034469351
-
A new technique for producing large-area as-deposited zero-stress LPCVD polysilicon films: the Multipoly process
-
J. Yang, H. Kahn, A.Q. He, S.M. Phillips and A.H. Heuer (2000) A new technique for producing large-area as-deposited zero-stress LPCVD polysilicon films: the Multipoly process. J. Microelectromech. Syst. 9 485-494.
-
(2000)
J. Microelectromech. Syst.
, vol.9
, pp. 485-494
-
-
Yang, J.1
Kahn, H.2
He, A.Q.3
Phillips, S.M.4
Heuer, A.H.5
-
115
-
-
0034514764
-
RF MEMS from a device perspective
-
J.J. Yao (2000) RF MEMS from a device perspective. J. Micromech. Microeng. 10 R9-R38.
-
(2000)
J. Micromech. Microeng.
, vol.10
, pp. R9-R38
-
-
Yao, J.J.1
-
116
-
-
0029264337
-
Strain analysis of silicon-on-insulator films produced by zone melting recrystallization
-
P.M. Zavracky, G.G. Adams and P.D. Aquilino (1995) Strain analysis of silicon-on-insulator films produced by zone melting recrystallization. J. Microelectromech. Syst. 4 42-48.
-
(1995)
J. Microelectromech. Syst.
, vol.4
, pp. 42-48
-
-
Zavracky, P.M.1
Adams, G.G.2
Aquilino, P.D.3
-
117
-
-
0029303827
-
pi) and long beam deflection (LBD) method
-
Q. Zou, Z. Li and L. Liu (1995) New methods for measuring mechanical properties of thin films in micromachining: beam pull-in voltage method (V pi) and long beam deflection (LBD) method. Sensors and Actuators A 48 137-143.
-
(1995)
Sensors and Actuators A
, vol.48
, pp. 137-143
-
-
Zou, Q.1
Li, Z.2
Liu, L.3
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