The mechanical strength of polysilicon films: Part 2. Size effects associated with elliptical and circular perforations

Journal of the Mechanics and Physics of Solids

Volumn 51, Issue 8, 2003, Pages 1551-1572

  Chasiotis, Ioannis ^a   Knauss, Wolfgang G ^b  

^a University of Virginia   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Failure strength; MEMS; Micronotches; Polysilicon; Specimen size effects; Weibull analysis

Indexed keywords

GRAIN SIZE AND SHAPE; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; POLYSILICON; STRENGTH OF MATERIALS; STRESSES; WEIBULL DISTRIBUTION;

MICRONOTCHES;

PLASTIC FILMS;

EID: 0038382884     PISSN: 00225096     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-5096(03)00050-4     Document Type: Article

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