Elastic properties and representative volume element of polycrystalline silicon for MEMS

Experimental Mechanics

Volumn 47, Issue 1, 2007, Pages 37-49

  Cho, S W ^a   Chasiotis, I ^b  

^a University of Virginia   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

AFM; Digital image correlation; Nanoscale mechanics; Polysilicon

Indexed keywords

DIGITAL IMAGE CORRELATION; NANOSCALE MECHANICS;

ATOMIC FORCE MICROSCOPY; DEFORMATION; ELASTIC MODULI; GRAIN SIZE AND SHAPE; MEMS; OPTICAL CORRELATION; POISSON RATIO;

POLYSILICON;

ATOMIC FORCE MICROSCOPY; DEFORMATION; ELASTIC MODULI; GRAIN SIZE AND SHAPE; MEMS; OPTICAL CORRELATION; POISSON RATIO; POLYSILICON;

EID: 33846285316     PISSN: 00144851     EISSN: 17412765     Source Type: Journal    
DOI: 10.1007/s11340-006-0405-7     Document Type: Article

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