Probabilistic Weibull behavior and mechanical properties of MEMS brittle materials

Journal of Materials Science

Volumn 38, Issue 20, 2003, Pages 4087-4113

  Jadaan, O M ^a   Nemeth, N N ^b   Bagdahn, J ^c   Sharpe Jr , W N ^d  

^a UNIVERSITY OF WISCONSIN PLATTEVILLE   (United States)

^b NASA GLENN RESEARCH CENTER   (United States)

^c FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

^d Johns Hopkins University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; PROBABILITY; SILICON CARBIDE; SILICON NITRIDE; SINGLE CRYSTALS; STRESS CONCENTRATION; WEIBULL DISTRIBUTION;

BRITTLE STRUCTURES; SINGLE CRYSTAL SILICON; WEAKEST LINK THEORY;

BRITTLENESS;

EID: 0345015823     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026317303377     Document Type: Article

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