Description of brittle failure of non-uniform MEMS geometries

Thin Solid Films

Volumn 515, Issue 6, 2007, Pages 3267-3276

  McCarty, A ^a   Chasiotis, I ^b  

^a University of Virginia   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Fracture strength; Polysilicon; Stress concentrations; Weibull

Indexed keywords

COMPUTATIONAL GEOMETRY; FRACTURE TOUGHNESS; MAXIMUM LIKELIHOOD ESTIMATION; MICROMACHINING; PARAMETER ESTIMATION; POLYSILICON; WEIBULL DISTRIBUTION;

MEMS GEOMETRIES; STRENGTH DATA; STRESS CONCENTRATIONS; WEIBULL PARAMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 33846327937     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.01.039     Document Type: Article

References (18)

1. Peirce F.T. J. Text. Inst. 17 (1926) 355
2. Weibull W. J. Appl. Mech. 18 (1951) 293
3. Ballarini R., Mullen R.L., and Heuer A.H. Int. J. Fract. 95 (1999) 19
4. Chasiotis I., Cho S., and Jonnalagadda K. Proc. Mat. Res. Soc. 854E (2005) U.10.6.1
5. Chasiotis I., and Knauss W.G. J. Mech. Phys. Solids 51 (2003) 1551
6. Chasiotis I., and Knauss W.G. Proc. Mat. Res. Soc. 687 (2002) B2.4.1
7. Knauss W.G., Chasiotis I., and Huang Y. Mech. Mater. 35 (2003) 217
8. LaVan D.A., Tsuchiya T., Coles G., Knauss W.G., Chasiotis I., and Read D. ASTM STP 1413 (2001) 1
9. Johnson G.C., Jones P.T., Wu M.T., and Honda T. Mechanical Properties of Structural Films. ASTM STP vol. 1413 (2001) 1
10. Bagdahn J., Sharpe W.N., and Jadaan O. J. MEMS 2 (2003) 302
11. Nemeth N.N., Janosik L.A., and Palko J.L. NAFEMS ′99 World Congress (1999) 1
12. Evans M., Hastings N., and Peacock B. Statistical Distributions. Second ed. (1993), John Wiley & Sons, Inc., NY
13. Sullivan J.D., and Lauson P.H. Mat. Sci. Lett. 5 (1980) 1245
14. Chasiotis I., and Knauss W.G. Exp. Mech. 42 (2002) 51
15. Chasiotis I., and Knauss W.G. Proc. of IX Int. Cong. of Soc. Exp. Mech. (2000) 56
16. I. Chasiotis, W.G. Knauss. "Experimentation at the Micron- and Submicron Scale", in: W. Gerberich, W. Yang (volume Eds.), Comprehensive Structural Integrity, vol. 8. Interfacial and Nanoscale Failure, Elsevier Science, 2003, p. 41.
17. Gurvich M.R., Dinbenedetto A.T., and Pegoretti A. J. Mater. Sci. 32 (1997) 3716
18. Chasiotis I., and Knauss W.G. J. Mech. Phys. Solids 51 (2003) 1533