Fatigue of polycrystalline silicon under long-term cyclic loading

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 9-15

  Bagdahn, Jörg ^a,b   Sharpe Jr , William N ^a  

^a Johns Hopkins University   (United States)

^b FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

Author keywords

Fatigue; Polysilicon; Reliability; Strength

Indexed keywords

ACTUATORS; CYCLIC LOADS; FATIGUE OF MATERIALS; STRENGTH OF MATERIALS; TENSILE STRENGTH;

EXTERNAL ACTUATORS;

POLYSILICON;

EID: 0037438920     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00328-X     Document Type: Conference Paper

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