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Volumn 505, Issue , 1998, Pages 623-628
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Determination of the mechanical properties of polysilicon thin films using bulge testing
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION;
ELASTICITY;
MICROMACHINING;
POLYCRYSTALLINE MATERIALS;
SILICON;
BULGE TESTING;
POLYSILICON THIN FILMS;
THIN FILMS;
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EID: 0031642124
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (11)
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References (16)
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