The mechanical strength of polysilicon films: Part 1. The influence of fabrication governed surface conditions

Journal of the Mechanics and Physics of Solids

Volumn 51, Issue 8, 2003, Pages 1533-1550

  Chasiotis, Ioannis ^a   Knauss, Wolfgang G ^b  

^a University of Virginia   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Hydrofluoric acid; Intergranular fracture; Mechanical strength; MEMS; Phosphorous doping; Polycrystalline silicon; Transgranular fracture

Indexed keywords

DELAMINATION; DOPING (ADDITIVES); ELASTIC MODULI; FRACTURE; GRAIN BOUNDARIES; HYDROFLUORIC ACID; MICROELECTROMECHANICAL DEVICES; PHOSPHORUS; STRENGTH OF MATERIALS; SURFACE ROUGHNESS;

TRANSGRANULAR FRACTURE;

PLASTIC FILMS;

EID: 0038721074     PISSN: 00225096     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-5096(03)00051-6     Document Type: Article

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