Fatigue failure in polysilicon not due to simple stress corrosion cracking

Science

Volumn 298, Issue 5596, 2002, Pages 1215-1218

  Kahn, H ^a   Ballarini, R ^a   Bellante, J J ^a   Heuer, A H ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BRITTLENESS; CYCLIC LOADS; FATIGUE OF MATERIALS; FRACTURE MECHANICS; STRESS CORROSION CRACKING; TENSILE STRESS;

SUBCRITICAL CRACK GROWTH; SURFACE ASPERITIES;

POLYSILICON;

SILICONE;

CORROSION; FRACTURE MECHANICS; STRESS;

AMBIENT AIR; ARTICLE; CORROSION; MEASUREMENT; MECHANICAL STRESS; PARTICLE SIZE; PRIORITY JOURNAL; SAMPLING; SURFACE PROPERTY; TENSILE STRENGTH;

EID: 0037044914     PISSN: 00368075     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (31)

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31. We thank Y. Wang for the finite element analysis of the doubly clamped beams. This work was supported by the Defense Advanced Research Projects Agency under contract N00014-00-1-0881.