Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter

Materials Science and Engineering: B

Volumn 83, Issue 1-3, 2001, Pages 42-47

  Ding, J N ^a   Meng, Y G ^a   Wen, S Z ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Mechanical properties; Micromechanical devices; Nanoindentation; Polysilicon; Thin films

Indexed keywords

DEFLECTION (STRUCTURES); ELASTIC MODULI; FRACTURE; INDENTATION; POLYSILICON; STRENGTH OF MATERIALS; THIN FILMS;

MICROMECHANICAL DEVICES; NANOINDENTATION; POLYSILICON MICROCANTILEVER BEAMS;

CANTILEVER BEAMS;

EID: 0035927973     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(00)00794-7     Document Type: Article

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