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Volumn 117, Issue 1, 2005, Pages 151-158

Comparison of the Young's modulus of polysilicon film by tensile testing and nanoindentation

Author keywords

Interferometry; Microvernier; Nanoindentation; Polysilicon; Young's modulus

Indexed keywords

ELASTIC MODULI; INTERFEROMETRY; MATERIALS SCIENCE; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION; TENSILE TESTING;

EID: 9644310245     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.06.008     Document Type: Article
Times cited : (41)

References (13)
  • 1
    • 0012578227 scopus 로고    scopus 로고
    • M. Gad-el-Hak (Ed.), CRC Press, Boca raton (Chapter 3)
    • W.N. Sharpe Jr., in: M. Gad-el-Hak (Ed.), The MEMS Handbook, vol. 7, CRC Press, Boca raton, 2001, pp. 1-33 (Chapter 3).
    • (2001) The MEMS Handbook , vol.7 , pp. 1-33
    • Sharpe Jr., W.N.1
  • 5
    • 0033897055 scopus 로고    scopus 로고
    • Materials issues in mircoelectromechanical systems (MEMS)
    • S.M. Spearing, Materials issues in mircoelectromechanical systems (MEMS), Acta Mater. 48 (2000) 179-196.
    • (2000) Acta Mater. , vol.48 , pp. 179-196
    • Spearing, S.M.1
  • 6
    • 0033338450 scopus 로고    scopus 로고
    • Materials characterization for MEMS: A comparison of uniaxial and bending tests
    • G.T. Johnson, P.T. Jones, R.T. Howe, Materials characterization for MEMS: a comparison of uniaxial and bending tests, Proc. SPIE 3874 (2000) 94-101.
    • (2000) Proc. SPIE , vol.3874 , pp. 94-101
    • Johnson, G.T.1    Jones, P.T.2    Howe, R.T.3
  • 10
    • 0031236953 scopus 로고    scopus 로고
    • A new technique for measuring the mechanical properties of thin films
    • W.N. Sharpe Jr., B. Yuan, R.L. Edwards, A new technique for measuring the mechanical properties of thin films, J. Microelectromech. Sys. 6 (1997) 193-199.
    • (1997) J. Microelectromech. Sys. , vol.6 , pp. 193-199
    • Sharpe Jr., W.N.1    Yuan, B.2    Edwards, R.L.3
  • 12
    • 21144472075 scopus 로고
    • Residual strain measurement of thin films using microfabricated vernier gages
    • C.-J. Kim, R.S. Muller, A.P. Pisano, Residual strain measurement of thin films using microfabricated vernier gages, Sen. Mater. 4 (1993) 291-304.
    • (1993) Sen. Mater. , vol.4 , pp. 291-304
    • Kim, C.-J.1    Muller, R.S.2    Pisano, A.P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.