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Volumn 117, Issue 1, 2005, Pages 151-158
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Comparison of the Young's modulus of polysilicon film by tensile testing and nanoindentation
c
MTS Korea
(South Korea)
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Author keywords
Interferometry; Microvernier; Nanoindentation; Polysilicon; Young's modulus
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Indexed keywords
ELASTIC MODULI;
INTERFEROMETRY;
MATERIALS SCIENCE;
MICROELECTROMECHANICAL DEVICES;
PARAMETER ESTIMATION;
TENSILE TESTING;
INTERFEROMETRIC STRAINS;
POLYSILICON FILMS;
STRAIN MEASUREMENTS;
POLYSILICON;
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EID: 9644310245
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/j.sna.2004.06.008 Document Type: Article |
Times cited : (41)
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References (13)
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