Rupture tests on polysilicon films through on-chip electrostatic actuation

Sensor Letters

Volumn 4, Issue 1, 2006, Pages 38-45

  Cacchione, Fabrizio ^a   De Masi, Biagio ^b   Corigliano, Alberto ^a   Ferrera, Marco ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

Polysilicon film; Weibull parameters; Young's modulus

Indexed keywords

ATMOSPHERIC HUMIDITY; ELASTIC MODULI; ELECTROSTATICS; POLYSILICON; STRESS CONCENTRATION; WEIBULL DISTRIBUTION;

FAILURE PROBABILITY; ON-CHIP ELECTROSTATIC ACTUATION; POLYSILICON FILM;

THIN FILMS;

EID: 33846018897     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2006.003     Document Type: Article

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