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Sensors and Actuators, A: Physical

Volumn 94, Issue 3, 2001, Pages 177-188

High-cycle fatigue and durability of polycrystalline silicon thin films in ambient air

(3) Muhlstein, C L a Brown, S B b Ritchie, R O a

a LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

b EXPONENT INC (United States)

Author keywords

Durability; Fatigue; MEMS; Polysilicon; Silicon; Stress life

Indexed keywords

CANTILEVER BEAMS; CYCLIC LOADS; DURABILITY; FATIGUE OF MATERIALS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; RESONATORS; STRESS ANALYSIS;

AMBIENT AIR; STRESS LIFE;

THIN FILMS;

EID: 0035923338 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(01)00709-9 Document Type: Article

Times cited : (174)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.