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Volumn 340, Issue 1, 1999, Pages 210-217

Micro/nanomechanical characterization of ceramic films for microdevices

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELASTIC MODULI; FRACTURE TOUGHNESS; HARDNESS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SILICON CARBIDE; SINGLE CRYSTALS; TRIBOLOGY; WEAR OF MATERIALS;

EID: 0032632404     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01153-5     Document Type: Article
Times cited : (115)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.