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Volumn 340, Issue 1, 1999, Pages 210-217
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Micro/nanomechanical characterization of ceramic films for microdevices
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Author keywords
[No Author keywords available]
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Indexed keywords
CERAMIC MATERIALS;
ELASTIC MODULI;
FRACTURE TOUGHNESS;
HARDNESS;
MICROELECTROMECHANICAL DEVICES;
NANOTECHNOLOGY;
SILICON CARBIDE;
SINGLE CRYSTALS;
TRIBOLOGY;
WEAR OF MATERIALS;
CERAMIC FILMS;
NANOINDENTATION;
POLYSILICON FILMS;
THIN FILMS;
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EID: 0032632404
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(98)01153-5 Document Type: Article |
Times cited : (115)
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References (8)
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