SCOPUS 정보 검색 플랫폼

Journal of Non-Crystalline Solids

Volumn 280, Issue 1-3, 2001, Pages 1-31

Silica films on silicon carbide: A review of electrical properties and device applications

(1) Raynaud, Christophe a

a UNIVERSITÉ DE LYON (France)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; ELECTRIC PROPERTIES; FILM GROWTH; INTERFACES (MATERIALS); MOLECULAR ORIENTATION; MOSFET DEVICES; OXIDATION; SILICON CARBIDE; SUBSTRATES; THERMAL EFFECTS;

DIELECTRIC STRENGTH;

SILICA;

EID: 0034833204 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(00)00350-1 Document Type: Review

Times cited : (159)

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