Fabrication of high-quality oxides on SiC by remote PECVD

Diamond and Related Materials

Volumn 6, Issue 10, 1997, Pages 1420-1423

  Golz A ^a   Gross S ^a   Janssen, R ^a   Stein Von Kamienski, E ^a   Kurz, H ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Pre deposition processing; Remote PECVD; Silicon carbide; Thermal oxidation

Indexed keywords

EID: 0042728292     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00048-4     Document Type: Article

References (9)

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