Anisotropic oxidation of silicon carbide

Diamond and Related Materials

Volumn 6, Issue 10, 1997, Pages 1467-1471

  Christiansen, Kai ^a   Christiansen, Silke ^a   Albrecht, Martin ^a   Strunk, Horst P ^a   Helbig, Reinhard ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Rutherford backscattering spectrometry; Silicon carbide; Thermal oxidation; Transmission electron microscopy

Indexed keywords

EID: 0012343125     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00077-0     Document Type: Article

References (6)

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