Elimination of SiC/SiO2 interface states by preoxidation ultraviolet-ozone cleaning

Applied Physics Letters

Volumn 68, Issue 15, 1996, Pages 2141-2143

  Afanas'ev, V V ^a   Stesmans, A ^a   Bassler, M ^b   Pensl, G ^b   Schulz, M J ^b   Harris, C I ^c  

^a KU LEUVEN   (Belgium)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^c ACREO AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000102171     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115611     Document Type: Article

References (12)

1. C. M. Zetterling and M. Östling, Phys. Scr. T54, 291 (1994).
2. D. Alok, P. K. McLarty, and B. J. Baliga, Appl. Phys. Lett. 65, 2177 (1994).
3. M. Shinohara, M. Yamanaka, S. Misawa, H. Okumura, and S. Yoshida, Jpn. J. Appl. Phys. 30, 240 (1991).
4. T. Billon, E. Bano, L. DiCioccio, T. Ouisse, P. Lassagne, and C. Jaussaud, Microelectron. Eng. 28, 193 (1995).
5. J. N. Shenoy, G. L. Chindalore, M. R. Melloch, J. A. Cooper, J. W. Palmour, and K. G. Irwine, J. Electron. Mater. 24, 303 (1995).
6. G. Pensl, V. V. Afanas'ev, M. Bassler, T. Troffer, J. Heindl, H. P. Strunk, M. Maier, and W. J. Choyke, presented at ICSCRM'95, Kyoto, 1995 (in press).
7. V. V. Afanas'ev, M. Bassler, G. Pensl, M. J. Schulz, and E. Stein von Kamienski, J. Appl. Phys. 79, 3108 (1996).
8. T. Takahagi, I. Nagai, A. Ishitani, H. Kuroda, and Y. Nagasawa, J. Appl. Phys. 64, 3516 (1988).
9. V. K. Adamchuk and V. V. Afanas'ev, Prog. Surf. Sci. 41, 109 (1992).
10. J. Robertson, J. Non-Cryst. Solids 137/138, 825 (1991).
11. S. Yokoyama, M. Hirose, Y. Osaka, T. Sawada, and S. Hasegawa, Appl. Phys. Lett. 38, 97 (1981).
12. T. Yamamoto, Y. Mishima, H. Hirose, and Y. Osaka, Jpn. J. Appl. Phys. 20, Suppl. 2, 185 (1981).