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Volumn 28, Issue 2, 1999, Pages 109-111

SIMS Analysis of Nitrided Oxides Grown on 4H-SiC

Author keywords

4H SiC; Nitrided oxide (NO); Secondary ion mass spectroscopy (SIMS) analysis

Indexed keywords

NITRIC OXIDE;

EID: 0033078987     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-999-0227-3     Document Type: Article
Times cited : (31)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.