Anisotropic oxidation of 6H-SiC

Journal of Applied Physics

Volumn 79, Issue 6, 1996, Pages 3276-3281

  Christiansen, K ^a   Helbig, R ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001162457     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361225     Document Type: Article

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