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Volumn 18, Issue 12, 1997, Pages 589-591

The planar 6H-SiC ACCUFET: A new high-voltage power MOSFET structure

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC BREAKDOWN; ELECTRIC FIELDS; ELECTRIC RESISTANCE; SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0031357365     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.644080     Document Type: Article
Times cited : (97)

References (13)
  • 1
    • 0027558366 scopus 로고
    • Comparison of 6H-SiC, 3C-SiC, and Si for power devices
    • Mar.
    • M. Bhatnagar and B. J. Baliga, "Comparison of 6H-SiC, 3C-SiC, and Si for power devices," IEEE Trans. Electron Devices, vol. 40, pp. 645-655, Mar. 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , pp. 645-655
    • Bhatnagar, M.1    Baliga, B.J.2
  • 5
    • 0028465018 scopus 로고
    • Characteristics of inversion-channel and buried-channel MOS devices in 6H-SiC
    • July
    • S. T. Sheppard, M. R. Melloch, and J. A. Cooper, "Characteristics of inversion-channel and buried-channel MOS devices in 6H-SiC" IEEE Trans. Electron Devices, vol. 41, pp. 1257-1263, July 1994.
    • (1994) IEEE Trans. Electron Devices , vol.41 , pp. 1257-1263
    • Sheppard, S.T.1    Melloch, M.R.2    Cooper, J.A.3
  • 6
    • 0031103557 scopus 로고    scopus 로고
    • High-voltage double-implanted power MOSFET's in 6H-SiC
    • Mar.
    • J. N. Shenoy, J. A. Cooper, and M. R. Melloch, "High-voltage double-implanted power MOSFET's in 6H-SiC," IEEE Electron Device Lett., vol. 18, pp. 93-95, Mar. 1997.
    • (1997) IEEE Electron Device Lett. , vol.18 , pp. 93-95
    • Shenoy, J.N.1    Cooper, J.A.2    Melloch, M.R.3
  • 7
    • 0029391667 scopus 로고
    • Planar, ion implanted, high-voltage 6H-SiC P-N junction diodes
    • Oct.
    • P. M. Shenoy and B. J. Baliga, "Planar, ion implanted, high-voltage 6H-SiC P-N junction diodes" IEEE Electron Device Lett., vol. 16, pp. 454-456, Oct. 1995.
    • (1995) IEEE Electron Device Lett. , vol.16 , pp. 454-456
    • Shenoy, P.M.1    Baliga, B.J.2
  • 8
    • 0028447880 scopus 로고
    • SiC devices: Physics and numerical simulation
    • June
    • (a) M. Ruff, H. Mitlehner, and R. Helbig, "SiC devices: Physics and numerical simulation," IEEE Trans. Electron Devices, vol. 41, pp. 1040-1054, June 1994
    • (1994) IEEE Trans. Electron Devices , vol.41 , pp. 1040-1054
    • Ruff, M.1    Mitlehner, H.2    Helbig, R.3
  • 10
    • 3643145713 scopus 로고    scopus 로고
    • CREE Research Inc., Durham, NC
    • CREE Research Inc., Durham, NC.
  • 11
    • 0027891946 scopus 로고
    • Low contact resistivity ohmic contacts to 6H-silicon carbide
    • D. Alok, B. J. Baliga, and P. K. McLarty, "Low contact resistivity ohmic contacts to 6H-silicon carbide," in IEDM Tech. Dig. 1993, pp. 691-694.
    • (1993) IEDM Tech. Dig. , pp. 691-694
    • Alok, D.1    Baliga, B.J.2    McLarty, P.K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.