Charge trapping in dry and wet oxides on N-type 6H-SiC studied by Fowler-Nordheim charge injection

Journal of Applied Physics

Volumn 79, Issue 5, 1996, Pages 2529-2534

  Stein Von Kamienski, E G ^a   Portheine, F ^a   Stein, J ^a   Golz A ^a   Kurz, H ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008536235     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361118     Document Type: Article

References (20)

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