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Materials Science and Engineering: B

Volumn 61-62, Issue , 1999, Pages 475-479

A study about the wet oxidation of crystalline and ion damaged 6H-SiC

(3) Nipoti, R a Madrigali, M a Sambo, A b

a CNR (Italy)

b UNIVERSITY OF PADOVA (Italy)

Author keywords

6H SiC; Crystalline; Wet oxidation

Indexed keywords

CRYSTALLINE MATERIALS; HYDROGEN; INTERFACES (MATERIALS); ION BOMBARDMENT; ION IMPLANTATION; MORPHOLOGY; OXIDATION; RADIATION DAMAGE; REACTION KINETICS; SILICA; SILICON CARBIDE; SURFACE STRUCTURE;

WET OXIDATION;

SEMICONDUCTING SILICON COMPOUNDS;

DAMAGE; OXIDATION;

EID: 0033618718 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(98)00559-5 Document Type: Article

Times cited : (14)

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