Piezoresistive CMOS sensor for out-of-plane normal stress

Sensors and Actuators, A: Physical

Volumn 176, Issue , 2012, Pages 10-18

  Lemke, Benjamin ^a   Baskaran, Rajashree ^b   Paul, Oliver ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b INTEL CORPORATION   (United States)

Author keywords

CMOS; Mechanical stress; Out of plane; Piezoresistive sensors; Vertical

Indexed keywords

CMOS; MECHANICAL STRESS; OUT-OF-PLANE; PIEZORESISTIVE SENSORS; VERTICAL;

CMOS INTEGRATED CIRCUITS; SENSORS;

STRESSES;

EID: 84857657377     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.12.038     Document Type: Article

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