The continuous spinning current (CSC) stress sensor method for the extraction of two stress components in an offset compensated manner

Sensors and Actuators, A: Physical

Volumn 127, Issue 2, 2006, Pages 255-260

  Bartholomeyczik, J ^a,b   Doelle, M ^a   Ruther, P ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b Dept EM   (Germany)

Author keywords

Continuous spinning current (CSC); Fourier transform; Hall sensor; Spinning current; Stress sensor; Stress sensor method; Switching current

Indexed keywords

AMPLIFIERS (ELECTRONIC); FOURIER TRANSFORMS; HALL EFFECT DEVICES; NONLINEAR SYSTEMS; PIEZOELECTRIC DEVICES; SIGNAL SYSTEMS; SILICON; THERMAL EFFECTS; THERMOELECTRICITY;

A/D CONVERSION; COMPENSATE THE OFFSETS; CONTINUOUS SPINNING CURRENT (CSC); FOUR-CONTACT STRESS SENSORS; PIEZO-FETS; PIEZORESISTORS; SILICON N- OR P-WELL DEVICE; STRESS SENSOR METHOD; SWITCHING CURRENT; WHEATSTONE BRIDGES;

SENSORS;

EID: 33644914216     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.08.036     Document Type: Article

References (21)

1. B. Kloeck, and N.F. Rooij Mechanical sensors S.M. Sze Semiconductor Sensors 1994 Wiley-Interscience New York 153 204
2. S. Middelhoek, and S.A. Audet Silicon Sensors 1994 Delft University Press Delft, Netherlands pp. 95-193
3. G.T.A. Kovacs Micromachined Transducers Sourcebook 1999 WCB McGraw-Hill New York pp. 210-273
4. J.C. Suhling, and R.C. Jaeger Silicon piezoresistive stress sensors and their application in electronic packaging IEEE Sens. J. 1 1 2001 14 29
5. W.G. Pfann, and R.N. Thurston Use of piezoresistive materials in the measurement of displacement, force, and torque J. Acoustic Soc. Am. 29 10 1957 1096 1101
6. K. Matsuda, Y. Kanda, K. Yamanura, and K. Suzuki Nonlinearity of piezoresistance effect in p- and n-type silicon Sens. Actuators A 21 1990 45 48
7. A.W. Herwaarden, and G.C.M. Meijer Thermal sensors S.M. Sze Semiconductor Sensors 1994 Wiley-Interscience New York 331 382
8. W.G. Pfann, and R.N. Thurston Semiconducting stress transducers utilizing the transverse and shear piezoresistance effects J. Appl. Phys. 32 10 1961 2008 2019
9. J. Bartholomeyczik, S. Brugger, P. Ruther, and O. Paul Multidimensional CMOS in-plane stress sensor IEEE Sens. J. 5 5 2005 872 882
10. M. Doelle, C. Peters, P. Gieschke, P. Ruther, and O. Paul Two-dimensional high density piezo-FET stress sensor arrays for in-situ monitoring of wire bonding processes Tech. Digest, MEMS Maastricht, Netherlands, January 25-29 2004 829 832
11. xy stresses from a single four-contact sensor using the spinning transverse voltage method Tech. Digest, MEMS Miami, USA, January 30-February 4 2005 263 266
12. R. Steiner, A. Haeberli, F.-P. Steiner, C. Maier, and H. Baltes Offset reduction in hall devices by continuous spinning current Sens. Actuators A 66 1998 167 172
13. R. Steiner, C. Maier, M. Mayer, S. Bellekom, and H. Baltes Influence of mechanical stress on the offset voltage of Hall devices operated with spinning current method J. Microelectromech. Systems 8 4 1999 466 472
14. C.E. Shannon Communications in the presence of noise Proc. IRE 37 1949 10 21
15. P. Ruther, U. Schiller, W. Buesser, R. Janke, O. Paul, in: Proceedings of the Eurosensors XVI, Prague, Czech Republic September 14-18, 2002, pp. 1209-1212.
16. C.S. Smith Piezoresistance effect in germanium and silicon Phys. Rev. 94 1954 42 49
17. O.N. Tufte, and E.L. Stelzer Piezoresistive properties of heavily doped n-type silicon Phys. Rev. 133 6a 1964 1705 1716
18. Y. Kanda A graphical representation of the piezoresistance coefficients in silicon IEEE Trans. Electron Devices ED-29 1991 64 70
19. M. Doelle, D. Mager, P. Ruther, and O. Paul Geometry dependent sensitivity of planar piezoresistive stress sensors based on the pseudo-hall effect Tech. Digest, IEEE MEMS Conference Miami Beach, USA, January 31-February 4 2005 267 270
20. P. Gray, P. Hurst, S. Lewis, and R. Meyer Analysis and design of analog integrated circuits 2001 John Wiley & Sons New York p. 421
21. C.C. Enz, and G.C. Temes Circuit techniques for reducing the effects of op-amp imperfections: autozeroing, correlated double sampling, and chopper stabilization Proc. IEEE 84 11 1996 1584 1614