A novel stress sensor based on the transverse pseudo-Hall effect of MOSFETs

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 490-493

  Doelle, Michael ^a   Ruther, Patrick ^a   Paul, Oliver ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HALL EFFECT; LOAD TESTING; MICROSENSORS; OPTICAL MICROSCOPY; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; SENSITIVITY ANALYSIS; STRESSES;

DRAIN-SOURCE; GATE-SOURCE; PSEUDO-HALL EFFECT; STRESS SENSITIVITY; STRESS SENSOR;

MOSFET DEVICES;

EID: 0037480236     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. A.T. Bradley, R.C. Jaeger, J.C. Suhling, K.J. O'Connor, "Piezoresistive Characteristics of Short-Channel MOSFETs on (100) Silicon", IEEE Trans. Electron Devices, vol. 48, no. 9 (2001), pp. 2009-2015
2. S.A. Gee, W.F. van den Bogert, V.R. Akylas, "Strain-Gauge Mapping of Die Surface Stress", IEEE Trans. on Components, Hybrids, and Manufacturing Technology, vol. 12, no. 4 (1989), pp. 587-593
3. M. Mayer, "Microelectronic Bonding Process Monitoring by Integrated Sensors", PhD Thesis no. 13685, ETH Zürich (2000)
4. H. Takao, Y. Matsumoto, M. Ishida, "Stress-Sensitive Differential Amplifiers Using Piezoresistive Effects of MOSFETs and Application to the Three-Axial Accelerometer", Sens. Actuators, vol. A65 (1998), pp. 61-68
5. H. Tuinhout, M. Pelgrom, R. Penning de Vries, M. Vertregt, "Effects of Metal Coverage on MOSFET Matching", Techn. Digest IEEE IEDM (1996), pp. 735-738
6. R.S. Popovic, "Hall Effect Devices", Adam Hilger New York (1991), p. 111
7. C.S. Smith, "Piezoresistance Effect in Germanium and Silicon", Phys. Rev., vol. 94 ( 1954), pp. 42-49
8. O.N. Tufte, E.L. Stelzer, "Piezoresistive Properties of Silicon Diffused Layers", Phys. Rev., vol. 133, no. 6a (1964), pp. 1705-1716
9. A.K. Mian, J.C. Suhling, R.C. Jaeger, B.M. Wilamowski, "Evaluation of Die Stress Using Van Der Pauw Sensors", Proc. International Mechanical Engineering Congress and Exposition ASME, vol. 226 (1997), pp. 59-67