Towards piezoresistive cmos sensors for out-of-plane stress

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 781-784

  Lemke, B ^a   Kratt, K ^a   Baskaran, R ^b   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS COMPATIBLE; CMOS SENSORS; EXPERIMENTAL SETUP; FINITE ELEMENT SIMULATIONS; GOLD BUMPS; JUNCTION FIELD EFFECTS; MECHANICAL STRESS; NORMAL STRESS; OUT-OF-PLANE; PIEZO-RESISTIVE; PIEZORESISTIVE SENSORS; SENSOR DESIGNS; SENSOR LOCATION; VERTICAL CURRENT; VERTICAL FORCE;

STRESSES;

SENSORS;

EID: 65949097508     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805499     Document Type: Conference Paper

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