Evaluation of the accuracy of out-of-plane normal stress detection using novel piezoresistive CMOS sensors

Proceedings of the ASME InterPack Conference 2009, IPACK2009

Volumn 1, Issue , 2010, Pages 463-469

  Lemke, Benjamin ^a   Baskaran, Rajashree ^b   Paul, Oliver ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS SENSORS; FREE SURFACES; HALL MEASUREMENTS; IN-PLANE NORMAL STRESS; NORMAL STRESS; OUT-OF-PLANE NORMAL STRESS; PIEZO-RESISTIVE; PIEZORESISTANCE; STRESS DETECTION; UNCERTAINTY SOURCES; VERTICAL CURRENT;

CRYSTALLOGRAPHY; SENSITIVITY ANALYSIS; SENSORS; STRESSES;

UNCERTAINTY ANALYSIS;

EID: 77953781262     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/InterPACK2009-89171     Document Type: Conference Paper

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