A method for measuring 3D stress distributions inside a silicon chip

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 998-1001

  Sutor, Alexander ^a   Lerch, Reinhard ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; ELECTRIC CONDUCTIVITY; ELECTRIC IMPEDANCE TOMOGRAPHY; INTEGRATED CIRCUITS; PIEZOELECTRICITY; STRESS CONCENTRATION;

RESISTIVITY DISTRIBUTIONS; SUBSTRATE CONTACTS; SURFACE CONTACTS;

SILICON SENSORS;

EID: 33847246883     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597870     Document Type: Conference Paper

References (12)

1. J. Brugger el al., "Microfabricated ultrasensitive contilevers for torque magnetometry," Sensors and Actuators, vol. 73, pp. 235-242, 1999.
2. H. C., L. J., S. W.W., and C. S.L., "Singularity image method for electrical impedance tomography of bubbly flows," Inverse Problems, 2003.
3. M. Cheney, D. Isaacson, and J. Newell, "Electrical impedancs tomography," in siam review. Society of Applied and Industrial Mathematics, 1999, vol. 41, no. 1, pp. 85-102.
4. E. E.O. and B. R.T., "Measurement of angular velocities using electrical impedance tomography," Flow Measurement and Instrumentation, Elsevier, 1998.
5. V. Gridchin and R. Pirogova, "Numerical Simulation of Multiterminal Silicon Piezoelements," Sensors and Actuators A, vol. 65, pp. 5-9, 1998.
6. C. Maier, M. Emmenegger, S. Taschini, H. Baltes, and J. Korvink, "Equivalent Circuit Model of Resistive IC Sensors Derived with the Box Integration Method," IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol. 18, pp. 1000-1012, 1999.
7. D. Manic, J. Petr, and R. Popovic, "Measurement of Mechanical Stress Drift in IC Packages Using the Piezo-Hall-Effect," ESSDERC, pp. 256-259, 1999.
8. R. Popovic, "The vertical hall-effect device," IEEE Electron Device Letters, vol. 5, pp. 357-358, 1984.
9. Z. Randjalovic, A. Pauchard, Y. Haddab, and R. Popovic, "A non plate-like Hall Sensor," Sensors and Actuators, vol. 76, pp. 293-297, 1999.
10. J. Suhling and R. Jaeger, "Silicon Piezoresistive Stress Sensors and Their Application in Electronic Packaging," IEEE Sensor Journal, vol. 1, pp. 14 29, 2001.
11. A. Sutor and R. Lerch, "Two-Chip Solution for a Mechanical Four-Component Sensor," in SENSOR2003, 2003, pp. 77-82, nuremberg, 13.-15.05.2003.
12. A. Sutor, R. Lerch, H. Hohe, and M. Gavesi, "New CMOS-Compatible Mechanical Shear Stress Sensor," IEEE Sensors Journal, vol. 1, no. 4, pp. 345-351, 2001.