New CMOS-Compatible Mechanical Shear Stress Sensor

IEEE Sensors Journal

Volumn 1, Issue 4, 2001, Pages 345-351

  Sutor, Alexander ^a   Lerch, Reinhard ^a   Hohe, Hans Peter ^b   Gavesi, Marco ^c,d  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

^c Institute for Integrated Circuits   (Italy)

^d UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

CMOS compatibility; Nonlinearity error; Piezoresistivity; Signal conditioning; Signal to noise ratio (SNR); Smart sensor; Stress sensor; Temperature behavior; Torque sensor

Indexed keywords

EID: 16244371649     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/7361.983475     Document Type: Article

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