Influence of mechanical stress on the offset voltage of Hall devices operated with spinning current method

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 466-472

  Steiner, Ralph ^a   Maier, Christoph ^a   Mayer, Michael ^a   Bellekom, Sandra ^b   Baltes, Henry ^a  

^a ETH ZURICH   (Switzerland)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR JUNCTIONS; STRESSES;

COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (CMOS) HALL DEVICES; CONTINUOUS SPINNING CURRENT METHODS;

MICROSENSORS;

EID: 0033319396     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809062     Document Type: Article

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