Novel highly miniaturized multi-stress sensor field effect transistor with eight source/drain terminals

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 321-324

  Doelle, M ^a   Bartholomeyczik, J ^a   Ruther, P ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Discrete spinning current method; Piezo FET; Piezoresistance; Stress sensor; Stress sensor arrays

Indexed keywords

DISCRETE SPINNING CURRENT METHOD; PIEZO-FET; PIEZORESISTANCE; STRESS SENSOR ARRAYS; STRESS SENSORS;

ARRAYS; CMOS INTEGRATED CIRCUITS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; SENSORS; VOLTAGE CONTROL;

FIELD EFFECT TRANSISTORS;

EID: 27544509486     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496421     Document Type: Conference Paper

References (7)

1. M. Doelle, C. Peters, P. Gieschke, P. Ruther, and O. Paul, "Two-Dimensional High Density Piezo-FET Stress Sensor Arrays for In-Situ Monitoring of Wire Bonding Processes," in Tech. Digest IEEE MEMS Conference, 2004, pp. 829-832.
2. B.J. Kane, M.R. Cutkosky, and G.T.A. Kovacs, "A traction stress sensor array for use in high-resolution robotic tactile imaging," J. Microelectromech. Syst., vol. 9, no. 4, pp. 425-434, 2000.
3. M. Doelle, P. Ruther, and O. Paul, "A Novel Stress Sensor Based on the Transverse Pseudo-Hall Effect of MOSFETs," in Proc. IEEE MEMS Conference, 2003, pp. 490-493.
4. A.T. Bradley, R.C. Jaeger, J.C. Suhling, and K.J. O'Connor, "Piezoresistive characteristics of short-channel MOSFETs on (100) silicon," IEEE Trans. Electron Devices, vol. 48, no. 9, pp. 2009-2015, Sept. 2001.
5. J. Bartholomeyczik, P. Ruther, and O. Paul, "Multidimensional CMOS In-Plane Stress Sensor," IEEE Sensors Journal, in press.
6. G. Dorda, I. Eisele, and H. Gesch, "Many-Valley Interactions in N-Type Silicon Inversion Layers," Phys. Rev. B, vol. 17, no. 4, pp. 1785-1798, 1978.
7. M. Doelle, D. Mager, P. Ruther, and O. Paul, "Geometry Dependent Sensitivity of Planar Piezoresistive Stress Sensors Based on the Pseudo-Hall Effect," in Tech. Digest IEEE MEMS Conference, 2005, pp. 267-270.