Piezoresistive CMOS sensors for out-of-plane shear stress

Proceedings of IEEE Sensors

Volumn , Issue , 2009, Pages 441-444

  Baumann, M ^a   Lemke, B ^a   Ruther, P ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SURFACES; CMOS PROCESSS; CMOS SENSORS; FINITE-ELEMENT; LINEAR SENSOR; OUT-OF-PLANE SHEAR; PIEZO-RESISTIVE; PIEZORESISTIVE EFFECTS; PSEUDO-HALL EFFECT; SENSOR CONCEPTS; SENSOR ELEMENTS; SILICON-BRIDGE; STRESS SENSOR; VERTICAL CURRENT; VERTICAL SHEAR;

CMOS INTEGRATED CIRCUITS; HALL EFFECT; MAGNETIC FIELD EFFECTS; SHEAR STRESS; STRENGTH OF MATERIALS;

SENSORS;

EID: 77951105537     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2009.5398265     Document Type: Conference Paper

References (8)

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