Evaluation of infrared thermography as a diagnostic tool in CVD applications

Journal of Crystal Growth

Volumn 187, Issue 3-4, 1998, Pages 463-473

  Johnson, E J ^a   Hyer, P V ^a   Culotta, P W ^a   Clark, I O ^a  

^a NASA LANGLEY RESEARCH CENTER   (United States)

Author keywords

Chemical vapor deposition; Infrared thermography; Laser velocimetry

Indexed keywords

CHEMICAL VAPOR DEPOSITION; INFRARED IMAGING; LASER APPLICATIONS; LASER DOPPLER VELOCIMETERS; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

INFRARED THERMOGRAPHY; LASER VELOCIMETRY;

THERMOGRAPHY (IMAGING);

EID: 0032474141     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(97)00818-X     Document Type: Article

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