Highly transparent nano-crystalline diamond films grown by microwave CVD

Solid State Communications

Volumn 107, Issue 6, 1998, Pages 301-305

  Bhusari, D M ^a   Yang, J R ^b   Wang, T Y ^c   Lin, S T ^b   Chen, K H ^a   Chen, L C ^c  

^a INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

A. thin films; B. chemical vapor deposition; C. optical properties

Indexed keywords

CARBON; FILM GROWTH; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; OPACITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE ROUGHNESS; THICK FILMS; THIN FILMS;

OPTICAL TRANSPARENCY; QUARTZ SUBSTRATES;

DIAMOND FILMS;

EID: 0032093313     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1098(98)00226-9     Document Type: Article

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