Plasma assisted CVD for low temperature coatings to improve the wear and corrosion resistance

Surface and Coatings Technology

Volumn 86-87, Issue PART 2, 1996, Pages 498-506

  Rie, K T ^a   Gebauer, A ^b   Wohle J ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Low temperature coating; Plasma assisted CVD; Plasma diagnostics; Wear resistance

Indexed keywords

ALUMINIUM ALLOYS; CORROSION RESISTANCE; STEELS; WEAR RESISTANCE;

CERMETS; CORROSION RESISTANCE; EXPERIMENTS; LOW TEMPERATURE ENGINEERING; PLASMA APPLICATIONS; WEAR RESISTANCE;

HARD COATING; LOW TEMPERATURE COATING;

PROTECTIVE COATINGS;

EID: 0030413620     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03177-5     Document Type: Article

References (21)

1. N. Kikuchi, Y. Oosawa and A. Nishiyama, Proc. 9th Int. Conf. on CVD, Pennington, NJ, 1984, Electrochemical Society, Pennington, NJ, 1984, p. 728.
2. G.S. Girolami, J.A. Jensen, J.E. Gozum and D.M. Pollina, Mater. Res. Soc. Symp. Proc. (Better Ceram. Chem. 3) 121 (1988) 429.
3. A.R. Barron, The Strem Chemiker, XIII (1990) 1.
4. H. Ehrhardt, Surf. Coat. Technol., 74/75 (1995) 29.
5. K.-T. Rie, A. Gebauer and J. Wöhle, Surf. Coat. Technol., 60 (1993) 385.
6. S.B. Kim, S.K. Choi, S.S. Chun and K.H. Kim. J. Vac. Sci. Technol., A 9(4) (1991) 2174.
7. A. Gebauer, VDI-Fortschrittber., 5 (1994) 344.
8. Li Shizi, Huang Wu, Yang Hongshun and Wang Zhongshu, Plasma Chem. Plasma Processing, 4 (1984) 147.
9. K.-T. Rie, J. Wöhle and A. Gebauer, Surf. Coat. Technol., 59 (1993) 202.
10. T. Arai, H. Fujita and K. Oguri, Thin Solid Films, 165 (1988) 139.
11. K.-T. Rie, J. Wöhle and A. Gebauer, J. Phys. (Paris) II, Coll., C 2 (1) (1991) 397.
12. R.M. Fix, R.G. Gordon and D.M. Hoffmann, Chem. Mater., 2 (1990) 235.
13. K. Oguri, H. Fujita and T. Arai, Thin Solid Films, 195 (1991) 77.
14. K.-T. Rie, A. Gebauer and J. Wöhle, Surf. Coat. Technol., 74/75 (1995) 362.
15. K.-T. Rie, A. Gebauer, J. Wöhle, G. Erker, R. Mohr and C. Sarter, Mater.-wiss. Werkstofftech., 25 (1994) 431.
16. K.-T. Rie, St. Eisenberg, U. König, H. van den Berg and R. Tabersky, Proc. EURO CVD 6, Jerusalem, 1987, 311.
17. K.-T. Rie, A. Gebauer, J. Wöhle, H.K. Tönshoff and C. Blawit, Surf. Coat. Technol., 74/75 (1995) 375.
18. M.C. Polo, J. Esteve and J.L. Morenza. Surf. Coat. Technol., 45 (1991) 67.
19. K.-T. Rie, A. Gebauer, J. Wöhle, G. Erker, C. Sarter and C. Fritze, Mater.-wiss. Werkstofftech., 24 (1993) 353.
20. N. Heide and J.W. Schultze, Nucl. Instrum. Meth. Phys. Res., B 80/81, 1993, p. 467.
21. N. Heide, B. Siemensmeyer and J.W. Schultze, Surf. Interface Analysis, 19 (1992) 423.