Carbon nanotube tipped atomic force microscopy for measurement of <100 nm etch morphology on semiconductors

Applied Physics Letters

Volumn 73, Issue 4, 1998, Pages 529-531

  Nagy, G ^a   Levy, M ^a   Scarmozzino, R ^a   Osgood Jr , R M ^a   Dai, H ^b   Smalley, R E ^b   Michaels, C A ^a   Flynn, G W ^a   McLane, G F ^c  

^a Och Spine at New York Presbyterian Hospitals   (United States)

^b RICE UNIVERSITY   (United States)

^c U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001058973     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122069     Document Type: Article

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