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Progress in Polymer Science (Oxford)

Volumn 26, Issue 1, 2001, Pages 3-65

Low dielectric constant polymers for microelectronics

(1) Maier, G a,b

a TECHNICAL UNIVERSITY OF MUNICH (Germany)

b POLYMATERIALS AG (Germany)

Author keywords

Dielectric constant; Interlayer dielectric; Intermetal dielectric; Low polymer; Low dielectrics; Low k polymer; Polymers for microelectronics

Indexed keywords

FLUORINE CONTAINING POLYMERS; HYDROCARBONS; INTERMETALLICS; MICROELECTRONICS; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

INTERLAYER DIELECTRIC;

AROMATIC POLYMERS;

EID: 0035247798 PISSN: 00796700 EISSN: None Source Type: Journal
DOI: 10.1016/S0079-6700(00)00043-5 Document Type: Review

Times cited : (1042)

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