Low-dielectric-constant materials for ULSI interlayer-dielectric applications

MRS Bulletin

Volumn 22, Issue 10, 1997, Pages 19-23

  Lee, Wei William ^a   Ho, Paul S ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC RESISTANCE; INTEGRATED CIRCUIT MANUFACTURE; PERMITTIVITY; ULSI CIRCUITS;

INTERLAYER DIELECTRICS; LOW DIELECTRIC CONSTANT MATERIALS;

DIELECTRIC MATERIALS;

EID: 0031256176     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/s0883769400034151     Document Type: Article

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