Electron spin resonance of pulsed plasma-enhanced chemical vapor deposited fluorocarbon films

Journal of Applied Physics

Volumn 82, Issue 4, 1997, Pages 1784-1787

  Labelle, Catherine B ^a   Limb, Scott J ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001113374     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365980     Document Type: Article

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