Recent advances in low K polymeric materials

Materials Research Society Symposium - Proceedings

Volumn 476, Issue , 1997, Pages 87-97

  Carter, K R ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; CMOS INTEGRATED CIRCUITS; ELECTRIC INSULATING MATERIALS; FLUORINE CONTAINING POLYMERS; INTEGRATED CIRCUIT MANUFACTURE; PERMITTIVITY; POLYIMIDES; THERMODYNAMIC STABILITY;

BACK END OF THE LINE (BEOL) THIN FILM INSULATORS;

DIELECTRIC MATERIALS;

EID: 0031335004     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-476-87     Document Type: Conference Paper

References (10)