Fluorinated heteroaromatic polyethers for low dielectric constant / high temperature applications

Macromolecular Symposia

Volumn 142, Issue , 1999, Pages 85-99

  Maier, Gerhard ^a   Haußmann, Jörg ^a   Dietlmeier, Marcus ^a   Banerjee, Susanta ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844374938     PISSN: 10221360     EISSN: None     Source Type: Journal    
DOI: 10.1002/masy.19991420110     Document Type: Article

References (31)

1. S. P. Murarka, Solid State Technol. 1996 (3), 83
2. C. H. Ting, T. E. Seidel, Mat. Res. Soc. Symp. Proc. 381, 3 (1996)
3. Semiconductor Industry Assosiation, The National Technology Roadmap for Semiconductors (1994, 1997)
4. P. Singer, Semiconductor International 1996 (11), 60
5. M. T. Bohr, Solid State Technol. 1996 (3), 105
6. S.-P. Jeng, R. H. Havemann, M.-C. Chang, Mat. Res. Soc. Symp. Proc. 337, 25 (1994)
7. H. Treichel, B. Withers, G. Ruhl, P. Ansmann, R. Würl, C. Müller, M. Dietlmeier, G. Maier: "Low Dielectric Constant Materials for Interlayer Dielectrics" in: Low-k and High-k Materials (H. S. Nalwa, Ed.), Academic Press, New York 1999
8. H. Treichel, G. Ruhl, P. Ansmann, R. Würl, C. Müller, M. Dietlmeier, Microelectronic Engineering 40, 1 (1998)
9. rd Ed., Elsevier, Amsterdam 1990, p. 321
10. For complete information see the MRS book series on "Low-Dielectric constant Materials": Vol. I: Mat Res. Soc. Symp. Proc. 381 (1995), T.-M. Lu, S. P. Murarka, T.-S. Kuan, C. H. Ting, Eds. Vol. II: Mat. Res. Soc. Symp. Proc. 443 (1996), A. Lagendijk, H. Treichel, K. J. Uram, A. C. Jones, Eds. Vol. III: Mat Res. Soc. Symp. Proc. 476 (1997), C. Case, P. Kohl, T. Kikkawa, W. W. Lee, Eds. Vol. IV: Mat. Res. Soc. Symp. Proc. 511 (1998), C. Chiang, P. S. Ho, T.-M. Lu, J. T. Wetzel, Eds.
11. For complete information see the MRS book series on "Low-Dielectric constant Materials": Vol. I: Mat Res. Soc. Symp. Proc. 381 (1995), T.-M. Lu, S. P. Murarka, T.-S. Kuan, C. H. Ting, Eds. Vol. II: Mat. Res. Soc. Symp. Proc. 443 (1996), A. Lagendijk, H. Treichel, K. J. Uram, A. C. Jones, Eds. Vol. III: Mat Res. Soc. Symp. Proc. 476 (1997), C. Case, P. Kohl, T. Kikkawa, W. W. Lee, Eds. Vol. IV: Mat. Res. Soc. Symp. Proc. 511 (1998), C. Chiang, P. S. Ho, T.-M. Lu, J. T. Wetzel, Eds.
12. For complete information see the MRS book series on "Low-Dielectric constant Materials": Vol. I: Mat Res. Soc. Symp. Proc. 381 (1995), T.-M. Lu, S. P. Murarka, T.-S. Kuan, C. H. Ting, Eds. Vol. II: Mat. Res. Soc. Symp. Proc. 443 (1996), A. Lagendijk, H. Treichel, K. J. Uram, A. C. Jones, Eds. Vol. III: Mat Res. Soc. Symp. Proc. 476 (1997), C. Case, P. Kohl, T. Kikkawa, W. W. Lee, Eds. Vol. IV: Mat. Res. Soc. Symp. Proc. 511 (1998), C. Chiang, P. S. Ho, T.-M. Lu, J. T. Wetzel, Eds.
13. For complete information see the MRS book series on "Low-Dielectric constant Materials": Vol. I: Mat Res. Soc. Symp. Proc. 381 (1995), T.-M. Lu, S. P. Murarka, T.-S. Kuan, C. H. Ting, Eds. Vol. II: Mat. Res. Soc. Symp. Proc. 443 (1996), A. Lagendijk, H. Treichel, K. J. Uram, A. C. Jones, Eds. Vol. III: Mat Res. Soc. Symp. Proc. 476 (1997), C. Case, P. Kohl, T. Kikkawa, W. W. Lee, Eds. Vol. IV: Mat. Res. Soc. Symp. Proc. 511 (1998), C. Chiang, P. S. Ho, T.-M. Lu, J. T. Wetzel, Eds.
14. R. N. Johnson, A. G. Farnham, R. A. Clendinning, W. F. Hale, C. N. Merriam, J. Polym. Sci.: Part A-1 5, 2375 (1967)
15. nd Ed. (H. F. Mark, N. M. Bikales, C. G. Overberger, G. Menges, Eds.), John Wiley & Sons, New York 1988, Vol. 13, p. 196
16. nd Ed. (H. F. Mark, N. M. Bikales, C. G. Overberger, G. Menges, Eds.), John Wiley & Sons, New York 1988, Vol. 12, p. 313
17. G. Maier: "Polymers with 5-membered aromatic heterocycles in the main chain" in: The Polymeric Materials Encyclopedia: Synthesis, Properties And Applications (J. C. Salamone, Ed.), CRC Press, Boca Raton 1966, Vol 5 H-L, p. 59
18. G. Maier, J. M. Schneider, Macromolecules 31, 1798 (1998)
19. J. W. Labadie, J. L. Hedrick, Polym. Prepr. (Am. Chem. Soc., Div. Polym. Chem.) 31(1), 344 (1990)
20. J. W. Labadie, J. L. Hedrick, Macromolecules 23, 5373 (1990)
21. G. Maier, R. Hecht, O. Nuyken, K. Burger, B. Helmreich, Macromolecules 26, 2583 (1993)
22. K. Burger, B. Helmreich, O. Jendrewski, R. Hecht, G. Maier, O. Nuyken, Makromol. Chem., Macromol. Symp. 82, 143 (1994)
23. G. Maier, R. Hecht, Macromolecules 28, 7558 (1995)
24. R. Lakhan, B. Ternai: "Advances in Oxazole Chemistry" in: Advances in Heterocyclic Chemistry (A. R. Katritzky, A. J. Boulton, Eds.), Academic Press, New York 1974, Vol. 17, p. 182
25. B. E. Maryanoff: "Oxazoles and Oxazolines in Organic Synthesis" in: Heterocyclic Compounds (A. Weissberger, E. C. Taylor, Eds.), John Wiley & Sons, new York 1986, Vol. 45, p. 1005
26. nd Ed., Van Nostrand Reinhold Co., London 1978, p. 315
27. R. Lakhan, B. Ternai: "Advances in Oxazole Chemistry" in: Advances in Heterocyclic Chemistry (A. R. Katritzky, A. J. Boulton, Eds.), Academic Press, New York 1974, Vol. 17, p. 152
28. A. R. Katritzky, J. M. Lagowski: "Structure of Five-membered Rings with Two or More Heteroatoms" in: Comprehensive Heterocyclic Chemistry (A. R. Katritzky, C. W. Rees, Ed.), Pergamon Press, Oxford 1984, Vol. 5, p. 1
29. N. Miyaura, K. Yamada, A. Suzuki, Tetrahedron Lett. 20, 3437 (1979)
30. N. Miyaura, A. Suzuki, Chem. Rev. 95, 2457 (1995)
31. th DUMIC, p. 109 (1998)