Nanoporous silica for low k dielectrics

Materials Research Society Symposium - Proceedings

Volumn 443, Issue , 1997, Pages 91-98

  Ramos, Teresa ^a   Roderick, Kevin ^a   Maskara, Alok ^a   Smith, Douglas M ^a  

^a Nanoglass LLC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; DENSITY (SPECIFIC GRAVITY); GELATION; NANOSTRUCTURED MATERIALS; PERMITTIVITY; POROSITY; POROUS MATERIALS; SILICA GEL; STRENGTH OF MATERIALS; SYNTHESIS (CHEMICAL); THERMODYNAMIC STABILITY; THIN FILMS;

INTERLAYER DIELECTRICS; INTERMETAL DIELECTRICS;

DIELECTRIC FILMS;

EID: 0030716632     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)