Effect of deposition and annealing on the thermomechanical properties of parylene films

Materials Research Society Symposium - Proceedings

Volumn 476, Issue , 1997, Pages 225-230

  Ryan, E Todd ^a   Miller, Mikel ^a   Ho, Paul S ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; AROMATIC POLYMERS; DIELECTRIC FILMS; MOLECULAR STRUCTURE; MOLECULAR WEIGHT; MORPHOLOGY; THERMAL CYCLING; THERMAL EFFECTS; THERMODYNAMIC STABILITY; VAPOR DEPOSITION;

PARYLENE;

PLASTIC FILMS;

EID: 0031356789     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)