Parylene copolymers

Materials Research Society Symposium - Proceedings

Volumn 476, Issue , 1997, Pages 197-205

  Taylor, Kelly J ^a   Eissa, Mona ^a   Gaynor, Justin F ^a   Jeng, Shin Puu ^a   Nguyen, Hoan ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ALUMINUM; CHEMICAL VAPOR DEPOSITION; COPOLYMERS; COPPER; INTEGRATED CIRCUITS; METALLIZING; PERMITTIVITY; SILICONES; SYNTHESIS (CHEMICAL); THERMODYNAMIC STABILITY; VINYL RESINS;

PARYLENE;

AROMATIC POLYMERS;

EID: 0031384601     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-476-197     Document Type: Conference Paper

References (11)