Comparison of three low dielectric constant organic polymers

Materials Research Society Symposium - Proceedings

Volumn 443, Issue , 1997, Pages 177-182

  Case, C B ^a   Case, C J ^a   Kornblit, A ^a   Mills, M E ^a   Castillo, D ^a   Liu, R ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DIELECTRIC MATERIALS; ELECTRIC CONNECTORS; ETCHING; PERMITTIVITY; VAPOR DEPOSITION;

PHYSICAL VAPOR DEPOSITION (PVD);

ORGANIC POLYMERS;

EID: 0030673879     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)